Abstract: A transport system for a spherical object. The transport system has a supply of a first fluid and a passageway for communication of a spherical object in a path between an inlet and an outlet. At least part of the passageway is bounded by a first tube having a first annular wall with at least one opening through the first annular wall. The first tube guides flow of a spherical object in the first fluid from the inlet towards the outlet. The transport system further includes a source of vacuum in communication with the passageway through the at least one opening through the first annular wall. The source of vacuum produces a low pressure region which causes the first fluid in the passageway to be drawn from the passageway through the at least one opening through the first annular wall. The transport system further includes a supply of a second fluid which is in communication with a spherical object moving between the inlet and the outlet.

Abstract: A spherical object supplying apparatus is to positively and smoothly supply, when spherical objects such as spherical single crystal silicons are supplied from a storing container such as a hopper to the following processing or manufacturing station (or apparatus), the spherical objects one at a time. The apparatus comprises: a supplying pipe path coupled to a spherical object storing container; a branch pipe which branches from the supplying pipe path; and a fluid supplying apparatus adapted to introduce pressurized fluid into the branch pipe path. The spherical objects are accelerated by the pressurized fluid which is jetted through the branch pipe path into the supplying pipe path.

Abstract: The present invention relates to a device for conveying spherical articles at high speed between sequential processes having different protective atmospheres, where the leakage of the atmospheres, which must be converted between the sequential processes, is prevented. The device includes a structure incorporating a rotary relay having a plurality of spherical-article accommodating chambers formed at predetermined intervals, a support container closely mounted on the rotary relay, and having a spherical-article receiving passage and a discharge passage. An atmosphere discharge pipe communicates with the spherical-article accommodating chambers of the rotary relay, and an atmosphere supply pipe is disposed adjacent to the spherical-article discharge portion of the rotary relay and communicates with the accommodating chambers.