Abstract: A gas supply system 200 is a system that supplies a predetermined gas from a gas supply source 210 to a processing part 110 of a semiconductor manufacturing apparatus 100. The gas supply system 200 includes a gas supply passage apparatus 220 that is connected to the gas supply source 210 and the processing part 110. The gas supply passage apparatus 220 is provided with a plurality of fluid controllers (a hand valve 231, a pressure reducing valve 232, a manometer 233, a check valve 234, a first shutoff valve 235, a second shutoff valve 236, a massflow controller 237, and a gas filter 238), and passage structuring members (passage blocks 241 to 249) that are connected to positions between the respective fluid controllers 231 to 238 and form gas passages 221 to 229. The passage structuring members are made of a carbon material. Thus, when a corrosive gas is supplied to the processing part 110, mixture of a metal contaminant into a substrate to be processed W can be prevented as much as possible.

Abstract: A developing apparatus having a developing sleeve provided with an elastic layer on its surface, and for developing an electrostatic image formed on an image bearing member with a mono-component magnetic toner having a mean degree of circularity of 0.965 or greater, a magnet provided in the developing sleeve, and a blade for regulating the amount of the developer carried on the developing sleeve satisfies the expressions |Br|/|B|?0.5 and Nsb/(Bs×R)?0.

Abstract: A gas supply system according to the present invention comprises a gas filter disposed in a gas supply flow passage through which a gas is supplied to a semiconductor manufacturing apparatus and a metal component remover disposed in the gas supply flow passage downstream relative to the gas filter, which removes a volatile metal component contained in the gas flowing through the gas supply flow passage by liquefying the volatile metal component. The structure adopted in the gas supply system prevents entry of the volatile metal component, which cannot be eliminated through the gas filter, into the semiconductor manufacturing apparatus as the corrosive gas is supplied thereto by the gas supply flow passage.

Abstract: A developing apparatus includes a developing roller for developing an image with a developer; a non-rotary magnet roll inside the roller; a blade; and an abutting member abutting against the roller, wherein the following expressions are satisfied: |Vs|>|Vdev|, |Br|/|B|?0.5, and L/(BH×R)?0.1, where |Vdev|: a DC component Vdev of a voltage applied to the roller, |Vs|: a DC component Vs of a voltage applied to the member, B(G): the magnetic flux density formed on the surface of the roller at the abutting position by the magnet roll, Br(G): the component of the magnetic flux density B(G) perpendicular to the surface of the roller, and L(mm): the abutting width between the roller and the member, BH(rad): the half value width of the component B?(G) horizontal to the surface of the roller, and R(mm): the radius of the roller.

Abstract: A developing apparatus having a rotatable developing sleeve having an elastic layer on the surface thereof for carrying a mono-component magnetic developer and urged against a photosensitive drum to develop an electrostatic image formed on the drum with the developer, a non-rotary magnet provided inside the sleeve for magnetically attracting the developer to the sleeve, and a blade having an abutting portion abutting against the sleeve in a counter direction for regulating the amount of the developer on the sleeve, a step portion spaced apart from the abutting portion, and a separating portion provided upstream of the step portion in the rotation direction of the sleeve, wherein the surface of the sleeve to which the separating portion is opposed includes a position satisfying |Br|/|B|?0.5, where B(G): the magnitude of magnetic flux density formed on the surface of the sleeve, and Br(G): a component of the magnetic flux density in a direction perpendicular to the surface of the sleeve.

Abstract: Branch piping (18) branches off from the upstream side of opening/closing valves (13d, 14d) provided near the entrance of a processing chamber (11) of a gas supply system for supplying a processing gas, and the branch piping (18) is connected to gas discharge piping (17). In the branch piping (18) are provided a gas flow rate detection mechanism (19) and opening/closing valves (13h, 14h) for switching a flow path between the processing chamber (11) side and the branch piping (18) side. The gas flow rate detection mechanism (19) causes a gas to flow through a resistance body to measure a pressure across the resistance body, detecting a gas flow rate from the pressure difference. Mass flow controllers (13a, 14a) are tested or corrected by the detected value.

Abstract: A developing apparatus includes a developer carrying member for carrying a developer including one component magnetic toner to develop an electrostatic image formed on an image bearing member. The developer carrying member includes an elastic member contactable to the image bearing member; magnetic field generating means, for attracting the developer to the developer carrying member, and a regulating member for regulating an amount of the developer carried on the developer carrying member. The developer is regulated by the regulating member and applied on the developer carrying member at 5-16 g/mk2. At a position where the regulating member is contacted to the developer carrying member, a magnetic flux density B generated by the magnetic field generating means, and a component Br of the magnetic flux density B normal to a surface of the developer carrying member, satisfy, |Br|/|B|?0.5.

Abstract: An image forming apparatus includes an image bearing member; a charging device for electrically charging the image bearing member; a rotatable developer carrying member for carrying a developer to develop an electrostatic image formed on the image bearing member with the developer, the developer carrying member being supplied with a developing bias voltage including an AC voltage; non-rotatable magnetic field generating device, disposed inside the developer carrying member, for magnetically attracting the developer on the developer carrying member, wherein the developer carrying member has a surface elastic layer, and the developer carrying member is press-contacted to the image bearing member, and the developer is one component magnetic toner, and a maximum value of an absolute value of the developing bias voltage |V|max and a surface potential of the image bearing member charge by the charging device is Vd(V), satisfy, |V|max=|Vd|.

Abstract: A developing device includes a rotatable developer carrying member for carrying a developer to develop an electrostatic image formed on an image bearing member with the developer; non-rotatable magnetic field generating means, disposed inside the developer carrying member, for magnetically attracting the developer on the developer carrying member; a regulating member for regulating an amount of the developer carried on the developer carrying member, wherein the developer carrying member is provided with a surface elastic layer, and the developer carrying member is press-contacted to the image bearing member, and wherein, the developer is an one component magnetic toner having an average circularity not less than 0.965, and an amount of the developer per unit area of the developer regulated by the regulating member is 5-14 g/m2, and an amount of electric charge thereof is 10-50 ?C/g.

Abstract: An image forming apparatus includes an image bearing member; a developer carrying member, contactable to the image bearing member, for carrying a developer to a developing position to develop an electrostatic image formed on the image bearing member with the developer; a supplying member for supplying the developer to the developer carrying member, wherein a peripheral speed of the developer carrying member is not less than 1.05 times and not more than 1.20 times a peripheral speed of the image bearing member, and an arithmetic average roughness Ra is not less than 0.20 times and not more than 0.33 times a volume average particle size of the developer, wherein a potential applied to the supplying member is different from a potential applied to the developer carrying member toward a larger potential of a regular charge polarity of the developer.

Abstract: A developing apparatus having a rotatable developing sleeve having an elastic layer on the surface thereof for carrying a mono-component magnetic developer and urged against a photosensitive drum to develop an electrostatic image formed on the drum with the developer, a non-rotary magnet provided inside the sleeve for magnetically attracting the developer to the sleeve, and a blade having an abutting portion abutting against the sleeve in a counter direction for regulating the amount of the developer on the sleeve, a step portion spaced apart from the abutting portion, and a separating portion provided upstream of the step portion in the rotation direction of the sleeve, wherein the surface of the sleeve to which the separating portion is opposed includes a position satisfying |Br|/|B|?0.5, where B(G): the magnitude of magnetic flux density formed on the surface of the sleeve, and Br(G): a component of the magnetic flux density in a direction perpendicular to the surface of the sleeve.

Abstract: A developing apparatus having: a rotatable developing roller for developing an electrostatic image with a mono-component magnetic developer at a developing position; a non-rotary magnet roll inside the roller; a blade for regulating the amount of the developer at a developer regulating position; and an abutting member abutting against the roller downstream of the developing position and upstream of the developer regulating position, wherein the following expressions are satisfied: |Vs|>|Vdev|, |Br|/|B|?0.5, and L/(BH×R)?0.

Abstract: A developing apparatus having a developing sleeve provided with an elastic layer on its surface, and for developing an electrostatic image formed on an image bearing member with a mono-component magnetic toner having a mean degree of circularity of 0.965 or greater, a magnet provided in the developing sleeve, and a blade for regulating the amount of the developer carried on the developing sleeve satisfies the expressions |Br|/|B|?0.5 and Nsb/(Bs×R)?0.

Abstract: A developing apparatus includes a developer carrying member for carrying a developer including one component magnetic toner to develop an electrostatic image formed on an image bearing member with the developer, said developer carrying member including an elastic member contactable to the image bearing member; magnetic field generating means, disposed in said developer carrying member, for generating a magnetic field for attracting the developer to said developer carrying member; and a regulating member for regulating an amount of the developer carried on said developer carrying member, wherein an amount, per unit area, of the developer regulated by said regulating member and applied on said developer carrying member is 5-16 g/m2, and at a position where said regulating member is contacted to said developer carrying member, a magnetic flux density B generated by said magnetic field generating means, and a component Br of the magnetic flux density B normal to a surface of said developer carrying member, satisf

Abstract: An image forming apparatus includes an image bearing member; charging means for electrically charging the image bearing member; a rotatable developer carrying member for carrying a developer to develop an electrostatic image formed on the image bearing member with the developer, the developer carrying member being supplied with a developing bias voltage comprising an AC voltage; non-rotatable magnetic field generating means, disposed inside the developer carrying member, for magnetically attracting the developer on the developer carrying member, wherein the developer carrying member has a surface elastic layer, and the developer carrying member is press-contacted to the image bearing member, and the developer is one component magnetic toner, and a maximum value of an absolute value of the developing bias voltage |V| max (V) and a surface potential of the image bearing member charge by the charging means is Vd global purposes V), satisfy, |V|max?|Vd|.

Abstract: A developing device includes a rotatable developer carrying member for carrying a developer to develop an electrostatic image formed on an image bearing member with the developer; non-rotatable magnetic field generating means, disposed inside the developer carrying member, for magnetically attracting the developer on the developer carrying member; a regulating member for regulating an amount of the developer carried on the developer carrying member, wherein the developer carrying member is provided with a surface elastic layer, and the developer carrying member is press-contacted to the image bearing member, and wherein, the developer is an one component magnetic toner having an average circularity not less than 0.965, and an amount of the developer per unit area of the developer regulated by the regulating member is 5-14 g/m2, and an amount of electric charge thereof is 10-50 ?C/g.

Abstract: A plasma-resistant member used in a reaction chamber of a plasma treating apparatus is formed of a dense alumina sintered product having an average grain size of 18-45 &mgr;m, a surface roughness Ra of 0.8-3.0 &mgr;m and a bulk density of 3.90 g/cm3 or over.

Abstract: In a thin-film deposition apparatus, a plurality of kinds of source gases are supplied to a reaction chamber one kind at a time by switching the supply of the source gases at high speed so as to reduce a process time. A supply passage is connected to the reaction chamber so as to supply the source gases and an inert gas to the reaction chamber. A source-gas supply opening is provided in the supply passage so as to supply each of the source gases to the supply passage. A source-gas valve is also provided in the supply passage for opening and closing the source-gas supply opening.

Abstract: A developing device including a housing, a developer bearing member rotatably provided in an opening portion of the housing, a developer containing chamber, and a developer supplying and removing member being in contact with the developer bearing member, and having the function of supplying a developer in the developer containing chamber to the developer bearing member and the function of removing the developer from the developer bearing member, wherein the developer bearing member is disposed above the developer containing chamber, and the developer supplying and removing member has the function of upwardly carrying the developer in the developer containing chamber.

Abstract: A cleaning end point detecting apparatus detects an end point of a cleaning process in which contamination attached to an inner wall of a reaction chamber is removed by introducing a cleaning gas into the chamber to produce a cluster cloud and detached particles. An irradiating unit irradiates a laser beam onto the cluster cloud and the detached particles within the reaction chamber to produce a scattered laser beam. A monitoring unit monitors the scattered laser beam as a two-dimensional image information. A judging unit judges the end point of the cleaning process on the basis of the two-dimensional image information. Preferably, the judging unit judges, as the end point of the cleaning process, a time instant when neither the detached particles nor the cluster cloud are detected on the basis of the two-dimensional image information.