Patents by Inventor Shunichi ETO

Shunichi ETO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER SUPPORT
    Publication number: 20240177974
    Abstract: A wafer support includes a base material including a machinable ceramic, a protective layer covering a surface of the base material, and conductive members and placed at least partially inside the base material. The protective layer includes a material that is less corrodible by plasma than the base material.
    Type: Application
    Filed: February 5, 2024
    Publication date: May 30, 2024
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru YAMAGISHI, Kazumasa MORI, Hitoshi KOUNO, Shunichi ETO
  • Ceramic, probe guiding member, probe card, and socket for package inspection
    Patent number: 11940466
    Abstract: A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at ?50 to 500° C. of 1.0×10?6 to 5.0×10?6/° C., is excellent in low electrostatic properties (106 to 1014 ?·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.
    Type: Grant
    Filed: October 19, 2018
    Date of Patent: March 26, 2024
    Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru Yamagishi, Kazumasa Mori, Shunichi Eto
  • CERAMIC, PROBE GUIDING MEMBER, PROBE CARD AND SOCKET FOR PACKAGE INSPECTION
    Publication number: 20230312423
    Abstract: A ceramic containing, in mass %: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, at least one selected from SiC and AlN: 2.0 to 17.0%, where AlN is 10.0% or less, at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5: 5.0 to 15.0%, wherein Fn calculated from the following equation (1) satisfies 0.02 to 0.40. This ceramic can be laser machined with high efficiency.
    Type: Application
    Filed: April 8, 2021
    Publication date: October 5, 2023
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru YAMAGISHI, Kazumasa MORI, Shunichi ETO
  • Ceramic, probe guiding member, probe card, and socket for package inspection
    Patent number: 11485686
    Abstract: A ceramic contains, in mass percent: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, and one or more oxides selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: November 1, 2022
    Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru Yamagishi, Kazumasa Mori, Shunichi Eto
  • Alumina sintered body, method for manufacturing the same, and part for semiconductor manufacturing apparatus
    Patent number: 11306029
    Abstract: An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: April 19, 2022
    Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Shunichi Eto, Osanobu Fukuo, Kiyotaka Saitou
  • CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION
    Publication number: 20210188714
    Abstract: A ceramic contains, in mass percent: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, and one or more oxides selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.
    Type: Application
    Filed: November 7, 2018
    Publication date: June 24, 2021
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru YAMAGISHI, Kazumasa MORI, Shunichi ETO
  • ALUMINA SINTERED BODY, METHOD FOR MANUFACTURING THE SAME, AND PART FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    Publication number: 20200239368
    Abstract: An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.
    Type: Application
    Filed: July 31, 2018
    Publication date: July 30, 2020
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Shunichi ETO, Osanobu FUKUO, Kiyotaka SAITOU
  • CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION
    Publication number: 20200241047
    Abstract: A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at ?50 to 500° C. of 1.0×10?6 to 5.0×10?6/° C., is excellent in low electrostatic properties (106 to 1014 ?·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.
    Type: Application
    Filed: October 19, 2018
    Publication date: July 30, 2020
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru YAMAGISHI, Kazumasa MORI, Shunichi ETO