Abstract: A container packaging apparatus includes a side edge chuck member that positions and holds both side ends of an opening of a packaging bag in place during a deaeration operation, suppressing development of crimps in a sealed area of the packaging bag. A high level of sealing of the packaging bag and thus the packaging of a container case with a resultant high level of quality in a stable manner can be obtained.

Abstract: The system includes a first conveying vehicle for holding and conveying wafers as products finished with an inspection step from a stock storage shelf group 11 to a reloading device 17, and a second conveying vehicle for holding and conveying a transporting container from a reloading device to a transporting storage shelf group: wherein a traveling course of the first conveying vehicle is provided on one side of the reloading device and a traveling course for the second conveying vehicle is provided on the other side; the reloading device includes a first mounting table for mounting the conveying container, a second mounting table for mounting the transporting container, and a reloading device for reloading wafers in the conveying container mounted on the first mounting table to the transporting container mounted on the second mounting table; and the installed number of the first mounting tables is larger than that of the second mounting tables.

Abstract: A cleaning vehicle provided with driving wheels for traveling on a rail having a trench-shaped driving space provided on the floor for cleaning the rail, wherein a vehicle body is provided with an air drawer formed by providing a filter to an air outlet hole, a tip end portion of a drawing hose connected to the air drawer is provided with an air drawing member having an opening on the bottom of the rail, an air outlet is formed on the wall of a box-shaped body covering the entire air drawer, and an air cleaning unit is provided to the air outlet.

Abstract: A conveying apparatus comprising a traveling unit which runs; a winding roller which is supported by the traveling unit; a belt which is wound on the winding roller so as to be unwound and wound by the winding roller; a pulley which has a peripheral surface guiding the belt and a diameter smaller than the diameter of the winding roller; and the pulley having no flange on both ends thereof; a belt positioning guide which is provided below the pulley and guides both edges of the belt in the win direction thereof so that the belt is positioned in the width direction; and a support unit which is attached to the belt and supports a conveyed object.

Abstract: Since a rear end portion of a packaging bag is fixed by a bag rear end chuck means when a wafer case is inserted into the packaging bag, therefore the degree of freedom of positioning of the packaging bag can be reduced, so that the wafer case can be smoothly packed in a predetermined position within the bag at any times. Consequently, this can help reduce the occurrence of crimps in the packaging bag and thus can provide the packaging of the wafer case with resultant high level of quality in a stable manner.

Abstract: A wafer case is inserted into a packaging bag, and an ear folding and shaping bar is pressed against a root of each corresponding triangular ear portion, making a folding back line in each triangular ear portion. Each of the triangular ear portions is folded back over a container side surface by a bag rear end ear folder. The folding operation for each of the triangular ear portions is performed precisely and smoothly.

Abstract: A positioning member for placing a substrate transporting holder on a supporting stand, which member is provided on the side of the supporting stand and is removably insertable into a slotted guide recess formed on a bottom surface of the substrate transporting holder. The positioning member has a stainless steel body composed of a cylindrical shaft and a pointed guide formed on top of the shaft; and a film formed by the co-deposition of polyfluoroethylene and nickel on a surface of the body.

Abstract: The system includes a first conveying vehicle for holding and conveying wafers as products finished with an inspection step from a stock storage shelf group 11 to a reloading device 17, and a second conveying vehicle for holding and conveying a transporting container from a reloading device to a transporting storage shelf group: wherein a traveling course of the first conveying vehicle is provided on one side of the reloading device and a traveling course for the second conveying vehicle is provided on the other side; the reloading device includes a first mounting table for mounting the conveying container, a second mounting table for mounting the transporting container, and a reloading device for reloading wafers in the conveying container mounted on the first mounting table to the transporting container mounted on the second mounting table; and the installed number of the first mounting tables is larger than that of the second mounting tables.

Abstract: A cleaning vehicle provided with driving wheels for traveling on a rail having a trench-shaped driving space provided on the floor for cleaning the rail, wherein a vehicle body is provided with an air drawer formed by providing a filter to an air outlet hole, a tip end portion of a drawing hose connected to the air drawer is provided with an air drawing member having an opening on the bottom of the rail, an air outlet is formed on the wall of a box-shaped body covering the entire air drawer, and an air cleaning unit is provided to the air outlet.

Abstract: A conveying apparatus comprising a traveling unit which runs; a winding roller which is supported by the traveling unit; a belt which is wound on the winding roller so as to be unwound and wound by the winding roller; a pulley which has a peripheral surface guiding the belt and a diameter smaller than the diameter of the winding roller; and the pulley having no flange on both ends thereof; a belt positioning guide which is provided below the pulley and guides both edges of the belt in the win direction thereof so that the belt is positioned in the width direction; and a support unit which is attached to the belt and supports a conveyed object.

Abstract: Since both side ends of an opening of a packaging bag are positioned and held in place by a side edge chuck means during a deaeration operation, therefore development of crimps in a sealed area of the packaging bag can be suppressed, so that a high level of sealing property of the packaging bag and thus the packaging of a container case with a resultant high level of quality in a stable manner can be obtained.

Abstract: After a wafer case having been inserted into a packaging bag, firstly an ear folding and shaping bar is pressed against a root of each corresponding triangular ear portion in its side to be folded back for making a folding-back line therein. After that, each of the triangular ear portions can be accordingly folded back over a container side surface by a bag rear end ear folding means. Consequently, this allows for the folding back operation for each of the triangular ear portions to be carried out precisely and smoothly.

Abstract: Since a rear end portion of a packaging bag is fixed by a bag rear end chuck means when a wafer case is inserted into the packaging bag, therefore the degree of freedom of positioning of the packaging bag can be reduced, so that the wafer case can be smoothly packed in a predetermined position within the bag at any times. Consequently, this can help reduce the occurrence of crimps in the packaging bag and thus can provide the packaging of the wafer case with resultant high level of quality in a stable manner.