Patents by Inventor Shunichi Ozono

Shunichi Ozono has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Container for treating with corrosive-gas and plasma and method for manufacturing the same
    Patent number: 6645585
    Abstract: There is provided a treatment container which enables to prolong a period of time taken for reaction products, such as a halide generated through reaction with corrosive halide gas, to exfoliate and fall down as particles, and decreases the frequency of periodic maintenance operation, thereby implementing increase of operating time. The treatment container constituting a chamber or a bell jar has a portion of the inner surface to be exposed to corrosive halide gas plasma and is formed with a sintered body mainly composed of a compound of yttrium and aluminum with oxygen, and the portion has a roughened surface of a mean roughness Ra of 1.5 to 10 &mgr;m.
    Type: Grant
    Filed: May 29, 2001
    Date of Patent: November 11, 2003
    Assignee: Kyocera Corporation
    Inventor: Shunichi Ozono
  • Container for treating with corrosive-gas and plasma and method for manufacturing the same
    Publication number: 20020009560
    Abstract: There is provided a treatment container which enables to prolong a period of time taken for reaction products, such as a halide generated through reaction with corrosive halide gas, to exfoliate and fall down as particles, and decreases the frequency of periodic maintenance operation, thereby implementing increase of operating time. The treatment container constituting a chamber or a bell jar has a portion of the inner surface to be exposed to corrosive halide gas plasma and is formed with a sintered body mainly composed of a compound of yttrium and aluminum with oxygen, and the portion has a roughened surface of a mean roughness Ra of 1.5 to 10 &mgr;m.
    Type: Application
    Filed: May 29, 2001
    Publication date: January 24, 2002
    Applicant: KYOCERA CORPORATION
    Inventor: Shunichi Ozono