Patents by Inventor Shunsuke Kadooka

Shunsuke Kadooka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma processing apparatus
    Patent number: 9805916
    Abstract: In a plasma processing apparatus, target values for feedback control to be applied to a progressive wave power PF as control parameters, i.e., control instruction values Con and Coff are switched during a pulse-on period Ton and a pulse-off period Toff in each cycle of a modulation pulse, respectively. That is, a first feedback control for making the progressive wave power PF approximate to a first control instruction value Con is performed during the pulse-on period Ton, whereas a second feedback control for making the progressive wave power PF approximate to a second control instruction value Coff is performed during the pulse-off period Toff.
    Type: Grant
    Filed: November 3, 2014
    Date of Patent: October 31, 2017
    Assignees: TOKYO ELECTRON LIMITED, DAIHEN CORPORATION
    Inventors: Hiroo Konno, Shunsuke Kadooka
  • PLASMA PROCESSING APPARATUS
    Publication number: 20150122421
    Abstract: In a plasma processing apparatus, target values for feedback control to be applied to a progressive wave power PF as control parameters, i.e., control instruction values Con and Coff are switched during a pulse-on period Ton and a pulse-off period Toff in each cycle of a modulation pulse, respectively. That is, a first feedback control for making the progressive wave power PF approximate to a first control instruction value Con is performed during the pulse-on period Ton, whereas a second feedback control for making the progressive wave power PF approximate to a second control instruction value Coff is performed during the pulse-off period Toff.
    Type: Application
    Filed: November 3, 2014
    Publication date: May 7, 2015
    Inventors: Hiroo Konno, Shunsuke Kadooka