Abstract: In a present vacuum treatment apparatus, a controller controls an auxiliary roller, a thermometer, a power source, and a temperature control mechanism, in which the controller detects a temperature of a base material wound and conveyed by a main roller, starts film deposition to form a film deposition material on the base material when the temperature of the base material is in a film deposition temperature range, adjusts, when the temperature of the base material is out of a threshold range after starting film deposition on the base material, the temperature of the main roller so that the temperature of the base material falls within the threshold range and adjusts an adhesion force between the main roller and the base material, and continues the film deposition of the film deposition material on the base material with the temperature of the base material in the film deposition temperature range.

Abstract: A work machine display system includes an image acquisition unit and a display control unit. The image acquisition unit acquires a captured image in which surroundings of a work machine are portrayed. The display control unit generates a display signal in order to display a display image including a peripheral image based on the captured image on a screen of a display unit after transition when the display control unit receives a transition signal for screen transition while the peripheral image is displayed on the display unit.

Abstract: The work machine includes a controller including a first storage unit capable of storing work machine information and capable of rewriting the stored work machine information, and a processing unit configured to collect the work machine information, and when trigger information for causing the first storage unit to start storing the work machine information occurs, the processing unit causes at least a portion of the collected work machine information to be stored to the first storage unit. The first storage unit stores header information. At a time when the trigger information occurs, the processing unit generates the work machine data from the collected work machine information in accordance with the header information and stores the work machine data to the first storage unit.

Abstract: A work machine includes a controller having a first storage unit that can store work machine information and rewrite the stored work machine information, and a processing unit that collects the work machine information, and stores at least one kind of the work machine information in the first storage unit when trigger information for causing the first storage unit to start storing the work machine information occurs. The controller can change from an outside at least one of the number of data prior to a trigger of the work machine information collected by the processing unit before the trigger information, the number of data subsequent to the trigger of the work machine information collected by the processing unit after the trigger information, and a time interval during which the work machine information is collected.

Abstract: The work machine includes a controller including a first storage unit capable of storing work machine information and capable of rewriting the stored work machine information, and a processing unit configured to collect the work machine information, and when trigger information for causing the first storage unit to start storing the work machine information occurs, the processing unit causes at least a portion of the collected work machine information to be stored to the first storage unit. The first storage unit stores header information. At a time when the trigger information occurs, the processing unit generates the work machine data from the collected work machine information in accordance with the header information and stores the work machine data to the first storage unit.

Abstract: A work machine includes a controller having a first storage unit that can store work machine information and rewrite the stored work machine information, and a processing unit that collects the work machine information, and stores at least one kind of the work machine information in the first storage unit when trigger information for causing the first storage unit to start storing the work machine information occurs. The controller can change from an outside at least one of the number of data prior to a trigger of the work machine information collected by the processing unit before the trigger information, the number of data subsequent to the trigger of the work machine information collected by the processing unit after the trigger information, and a time interval during which the work machine information is collected.

Abstract: A handling robot control method is disclosed for a handling robot disposed in a transfer chamber (1) having a plurality of process chamber stations (2e) arranged around it in communication therewith via respective gates (6), the robot having a first and a second carrier tables (8a, 8b) that are deviated in turning angular position from one to the other about a center of turning, the robot performing an operation to move the first and second carrier tables to turn jointly in the transfer chamber and also an operation to move the first and second carrier tables individually either to project through a said gate into a said process chamber station or to retract into the transfer chamber. The method comprises: overlapping the operation to move the carrier tables to project and to retract with the operation to move the first and second carrier tables to turn jointly.

Abstract: A handling robot comprises a first and a second robotic link mechanism (B1, B2) so configured as to be jointly rotatable. Each mechanism has a transfer table (8a, 8b) at its forward end and is adapted to operatively be projected and retracted in a radial direction with respect to the transfer table when operatively extended and contracted. The first and second robotic mechanisms are arranged so that the two transfer tables may located within a narrow angular range.

Abstract: A control device for a work carrying system characterized in that a first point where the moving action of a work transitions from a moving action from an origin process chamber to a transfer chamber to a moving action inside the transfer chamber and a second point where the moving action of the work transitions from the moving action inside the transfer chamber to a moving action from the transfer chamber to a destination process chamber are set on a moving path of the work, and that speed patterns on the moving path are set based on a transfer distance of the work and time required to open and close gate means of the origin and destination process chambers such that the opening of a gate valve at the destination is completed when the work reaches the second point on the moving path and that a transfer time from the first point to the second point becomes the shortest time which is longer than the opening and closing time of the gate valve, the speed of a work carrying robot being controlled in accordance wi