Patents by Inventor Shweta Humad

Shweta Humad has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Piezoelectric on semiconductor-on-insulator microelectromechanical resonators
    Patent number: 6909221
    Abstract: A piezoelectric resonator is disclosed. In one embodiment the piezoelectric resonator includes a resonating member having a bi-directionally adjustable resonance frequency, the resonating member including a semiconductor material of a semiconductor-on-insulator wafer, the semiconductor-on-insulator wafer including an oxide layer adjacent to the semiconductor material and a handle layer adjacent to the oxide layer, the oxide layer disposed between the handle layer and the semiconductor material, and electrode, and a piezoelectric material disposed between the semiconductor material and the electrode, and a capacitor created by the semiconductor material and the handle layer separated by an air gap formed out of the oxide layer, wherein the capacitor is configured to receive a direct current voltage that adjusts the resonance frequency of the resonating member.
    Type: Grant
    Filed: July 31, 2003
    Date of Patent: June 21, 2005
    Assignee: Georgia Tech Research Corporation
    Inventors: Farrokh Ayazi, Gianluca Piazza, Reza Abdolvand, Gavin Kar-Fai Ho, Shweta Humad
  • Piezoelectric on semiconductor-on-insulator microelectromechanical resonators and methods of fabrication
    Publication number: 20040021403
    Abstract: A piezoelectric resonator is disclosed. In one embodiment the piezoelectric resonator includes a semiconductor material, an electrode, and a piezoelectric material disposed between the semiconductor material and the electrode.
    Type: Application
    Filed: July 31, 2003
    Publication date: February 5, 2004
    Applicant: Georgia Tech Research Corporation
    Inventors: Farrokh Ayazi, Gianluca Plazza, Reza Abdolvand, Gavin Kar-Fai Ho, Shweta Humad