Patents by Inventor Simon Nicholas BINNS

Simon Nicholas BINNS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pedestal lift for semiconductor processing chambers
    Patent number: 11251067
    Abstract: Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.
    Type: Grant
    Filed: April 26, 2019
    Date of Patent: February 15, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Brian T. West, Miroslav Gelo, Yan Rozenzon, Roger M. Johnson, Mark Covington, Soundarrajan Jembulingam, Simon Nicholas Binns, Vivek Vinit
  • Smart chamber and smart chamber components
    Patent number: 10930479
    Abstract: A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: February 23, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Roger M. Johnson, Michael S. Cox
  • PEDESTAL LIFT FOR SEMICONDUCTOR PROCESSING CHAMBERS
    Publication number: 20200343126
    Abstract: Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.
    Type: Application
    Filed: April 26, 2019
    Publication date: October 29, 2020
    Inventors: Brian T. WEST, Miroslav GELO, Yan ROZENZON, Roger M. JOHNSON, Mark COVINGTON, Soundarrajan JEMBULINGAM, Simon Nicholas BINNS, Vivek VINIT
  • SMART CHAMBER AND SMART CHAMBER COMPONENTS
    Publication number: 20190096643
    Abstract: A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.
    Type: Application
    Filed: November 28, 2018
    Publication date: March 28, 2019
    Inventors: Simon Nicholas BINNS, Brian T. WEST, Ronald Vern SCHAUER, Roger M. JOHNSON, Michael S. COX
  • Smart chamber and smart chamber components
    Patent number: 10153143
    Abstract: A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.
    Type: Grant
    Filed: February 16, 2015
    Date of Patent: December 11, 2018
    Assignee: Applied Materials, Inc.
    Inventors: Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Roger M. Johnson, Michael S. Cox
  • SMART CHAMBER AND SMART CHAMBER COMPONENTS
    Publication number: 20150262798
    Abstract: A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.
    Type: Application
    Filed: February 16, 2015
    Publication date: September 17, 2015
    Inventors: Simon Nicholas BINNS, Brian T. WEST, Ronald Vern SCHAUER, Roger M. JOHNSON, Michael S. COX