Patents by Inventor Sinichiro Izumi

Sinichiro Izumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5887604
    Abstract: Disclosed herein is a washing apparatus comprising a washing chamber, an opening/closing mechanism, and a nozzle. The chamber has an opening and is designed for washing the objects transported from outside through the opening. The opening/closing mechanism is designed to open and close the opening of the washing chamber. The nozzle is used to wash the opening/closing mechanism. The apparatus further comprises a washing vessel filled with a washing liquid, for washing the objects, and also a nozzle for applying a washing liquid to the objects located in the washing vessel when the objects are partly exposed as the washing liquid is discharged from the washing vessel.
    Type: Grant
    Filed: November 5, 1996
    Date of Patent: March 30, 1999
    Assignees: Tokyo Electron Limited, Tokyo Electron Saga Limited
    Inventors: Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Takami Satoh, Hirofumi Shiraishi, Koji Harada, Takayuki Tomoeda, Hiroshi Tanaka
  • Patent number: 5782990
    Abstract: A washing method for washing objects includes the steps of supplying a washing liquid to a washing vessel and immersing objects in the washing liquid contained in the washing vessel. The method also includes the steps of discharging the liquid at least once from the washing vessel, and starting to apply the washing liquid to the objects when the objects are partly exposed to air as the liquid is discharged from the washing vessel. The washing liquid application is continued during exposure of the objects to the air to prevent the surface of the objects from being dried and stained.
    Type: Grant
    Filed: January 27, 1997
    Date of Patent: July 21, 1998
    Assignees: Tokyo Electron Limited, Tokyo Electron Saga Limited
    Inventors: Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Takami Satoh, Hirofumi Shiraishi, Koji Harada, Takayuki Tomoeda, Hiroshi Tanaka
  • Patent number: 5671764
    Abstract: Disclosed herein is a washing apparatus comprising a washing chamber, an opening/closing mechanism, and a nozzle. The chamber has an opening and is designed for washing the objects transported from outside through the opening. The opening/closing mechanism is designed to open and close the opening of the washing chamber. The nozzle is used to wash the opening/closing mechanism. The apparatus further comprises a washing vessel filled with a washing liquid, for washing the objects, and also a nozzle for applying a washing liquid to the objects located in the washing vessel when the objects are partly exposed as the washing liquid is discharged from the washing vessel.
    Type: Grant
    Filed: November 20, 1995
    Date of Patent: September 30, 1997
    Assignees: Tokyo Electron Limited, Tokyo Electron Saga Limited
    Inventors: Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Takami Satoh, Hirofumi Shiraishi, Koji Harada, Takayuki Tomoeda, Hiroshi Tanaka
  • Patent number: 5488964
    Abstract: Disclosed herein is a washing apparatus comprising a washing chamber, an opening/closing mechanism, and a nozzle. The chamber has an opening and is designed for washing the objects transported from outside through the opening. The opening/closing mechanism is designed to open and close the opening of the washing chamber. The nozzle is used to wash the opening/closing mechanism. The apparatus further comprises a washing vessel filled with a washing liquid, for washing the objects, and also a nozzle for applying a washing liquid to the objects located in the washing vessel when the objects are partly exposed as the washing liquid is discharged from the washing vessel.
    Type: Grant
    Filed: May 7, 1992
    Date of Patent: February 6, 1996
    Assignees: Tokyo Electron Limited, Tokyo Electron Saga Limited
    Inventors: Shinya Murakami, Yuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Takami Satoh, Hirofumi Shiraishi, Koji Harada, Takayuki Tomoeda, Hiroshi Tanaka