Abstract: An apparatus monitoring semiconductor manufacturing equipment includes; an optical detector, a light generator generating light along a first optical path towards a semiconductor substrate, wherein upon irradiating the semiconductor substrate, the light becomes reflected light along a second optical path away from the semiconductor substrate and towards the optical detector, a first grating reticle between the light generator and the semiconductor substrate and including first slits having a first pitch and second slits having a second pitch different from the first pitch, a second grating reticle between the semiconductor substrate and the optical detector and including third slits having a third pitch different from the first pitch and the second pitch, wherein the optical detector determines a positional attribute of the semiconductor substrate in relation to a first pattern and a second pattern, the first pattern corresponds to a first portion of light/reflected light sequentially passing through the firs

Abstract: A bowl cleansing device and a fruit and vegetable cleansing method using the same are provided. The bowl cleansing device comprising: a cabinet for forming a cleansing room; a cleansing basket installed inside the cleansing room, for loading therein articles to be cleansed; a spray nozzle for spraying the cleansing water to the articles loaded in the cleansing basket; a pump for supplying the cleansing water to the spray nozzle; a heater for heating the cleansing water; a mode selector for selecting one of a plurality of modes including a bowl cleansing mode and a fruit and vegetable cleansing mode; and a controller for controlling the heater so that the cleansing water has a temperature suitable for the cleansing mode selected through the mode selector.