Patents by Inventor Siow Lee Chwa

Siow Lee Chwa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080266944
    Abstract: A non-volatile memory cell includes an access and a storage transistor coupled in series. The memory cell is formed on a thin gate well tailored for transistors with thin gate dielectrics. The access transistor is a hybrid transistor which includes a gate with a thick gate dielectric layer formed on the thin gate well.
    Type: Application
    Filed: April 27, 2007
    Publication date: October 30, 2008
    Applicant: Chartered Semiconductor Manufacturing, Ltd.
    Inventors: Xiaoyu Chen, Donghua Liu, Sung Mun Jung, Swee Tuck Woo, Rachel Low, Louis Lim, Siow Lee Chwa
  • Patent number: 7355896
    Abstract: A memory system includes a memory block having at least one memory cell. The current is sensed after the erase operations of the memory cell. A signal is generated in response to the current dropping below a predetermined level after the erase operations of the memory cell. The stress on the memory cell is reduced to a first reduced level for erase operations occurring subsequent to the current dropping below the predetermined level.
    Type: Grant
    Filed: December 22, 2005
    Date of Patent: April 8, 2008
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Wenbo Li, Maggie L. F. Tan, Siow Lee Chwa, Fei Xu
  • Patent number: 7029976
    Abstract: A method of manufacturing a charge storage layer for a SONOS memory device. A feature of the embodiment is the first gate layer is formed over the charge storing layer (ONO) before the charge storing layer is patterned. The first gate layer protects the charge storing layer (ONO) from various etches used in the process to pattern the various gate dielectric layers on other regions of substrate.
    Type: Grant
    Filed: January 21, 2005
    Date of Patent: April 18, 2006
    Assignee: Chartered Semiconductor Manufacturing. LTD
    Inventors: Sripad Sheshagiri Nagarad, Dong Kyun Sohn, Yoke Leng Louis Lim, Siow Lee Chwa, Hsiang Fang Lim
  • Patent number: 6835609
    Abstract: A method of forming a double gated SOI channel transistor comprising the following steps. A substrate having an SOI structure formed thereover is provided. The SOI structure including a lower SOI silicon oxide layer and an upper SOI silicon layer. The SOI silicon layer is patterned to form a patterned silicon layer. A dummy layer is formed over the SOI silicon oxide layer and the patterned SOI silicon layer. The dummy layer is patterned to form a damascene opening therein exposing: a portion of the lower SOI silicon oxide layer; and a central portion of the patterned SOI silicon layer to define a source structure and a drain structure. Patterning the exposed lower SOI silicon oxide layer to form a recess. Gate oxide layer portions are formed around the exposed portion of the patterned SOI silicon layer. A planarized layer portion is formed within the final damascene opening. The planarized layer portion including a bottom gate and a top gate.
    Type: Grant
    Filed: September 17, 2003
    Date of Patent: December 28, 2004
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Yong Meng Lee, Da Jin, Mau Lam Lai, David Vigar, Siow Lee Chwa
  • Patent number: 6399443
    Abstract: A method is provided for manufacturing a multiple voltage flash memory integrated circuit structure on a semiconductor substrate having a plurality of shallow trench isolations and a floating gate structure. A first dielectric layer is formed and a portion removed to expose regions of the semiconductor substrate for first and second low voltage devices. A second dielectric layer is formed over the first dielectric layer and the semiconductor substrate and a portion removed to expose a region of the semiconductor substrate for the second low voltage device. A third dielectric layer is formed over the second dielectric layer to form: a floating gatedevice including the first, second, and third dielectric layers; a first voltage device including the first, second, and third dielectric layers; a second voltage device including the second and third dielectric layers; and a third voltage device including the third dielectric layer.
    Type: Grant
    Filed: May 7, 2001
    Date of Patent: June 4, 2002
    Assignee: Chartered Semiconductor Manufacturing LTD
    Inventors: Siow Lee Chwa, Yung Tao Lin
  • Patent number: 6147008
    Abstract: A new method is provided for the creation of an oxide layer that contains three different thicknesses. A first layer of oxide is grown on the surface of a substrate; a first layer of photoresist is deposited and patterned thereby partially exposing the surface of the underlying first layer of oxide. A nitrogen implant is performed into the surface of the underlying substrate; the photoresist mask of the first layer of photoresist is removed. A second layer of photoresist is deposited and patterned, the first layer of oxide is removed from above and surrounding the implanted regions of the substrate. The second mask of resist is removed.
    Type: Grant
    Filed: November 19, 1999
    Date of Patent: November 14, 2000
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Siow Lee Chwa, Ying Jin, Yung-Tao Lin