Patents by Inventor Sisira Gamage

Sisira Gamage has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pressure sensors and methods of making the same
    Publication number: 20070052046
    Abstract: A pressure sensor includes a base substrate silicon fusion bonded to a cap substrate with a chamber disposed between the base substrate and the cap substrate. Each of the base substrate and the cap substrate include silicon. The base substrate includes walls defining a cavity and a diaphragm portion positioned over the cavity, wherein the cavity is open to an environment to be sensed. The chamber is hermetically sealed from the environment.
    Type: Application
    Filed: August 24, 2005
    Publication date: March 8, 2007
    Inventors: Stanley Chu, Sisira Gamage, Hyon-Jin Kwon