Patents by Inventor Sivasankar Nagarajan
Sivasankar Nagarajan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230343568Abstract: Capacitive sensors and capacitive sensing data integration for plasma chamber condition monitoring are described. In an example, a plasma chamber monitoring system includes a plurality of capacitive sensors, a capacitance digital converter, and an applied process server coupled to the capacitance digital converter, the applied process server including a system software. The capacitance digital converter includes an isolation interface coupled to the plurality of capacitive sensors, a power supply coupled to the isolation interface, a field-programmable gate-array firmware coupled to the isolation interface, and an application-specific integrated circuit coupled to the field-programmable gate-array firmware.Type: ApplicationFiled: November 29, 2022Publication date: October 26, 2023Inventors: Yaoling Pan, Patrick John Tae, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy N. Shang, Mikhail V. Taraboukhine, Charles R. Hardy, Sivasankar Nagarajan
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Publication number: 20230345137Abstract: Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.Type: ApplicationFiled: June 26, 2023Publication date: October 26, 2023Inventors: Upendra Ummethala, Philip Kraus, Keith Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar, Shivaraj Manjunath Nara, Anandakumar Parameshwarappa, Sivasankar Nagarajan, Dhirendra Kumar
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Patent number: 11736818Abstract: Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.Type: GrantFiled: February 9, 2022Date of Patent: August 22, 2023Assignee: Applied Materials, Inc.Inventors: Upendra Ummethala, Philip Kraus, Keith Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar, Shivaraj Manjunath Nara, Anandakumar Parameshwarappa, Sivasankar Nagarajan, Dhirendra Kumar
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Publication number: 20230103165Abstract: Capacitive sensors and capacitive sensing data integration for plasma chamber condition monitoring are described. In an example, a plasma chamber monitoring system includes a plurality of capacitive sensors, a capacitance digital converter, and an applied process server coupled to the capacitance digital converter, the applied process server including a system software. The capacitance digital converter includes an isolation interface coupled to the plurality of capacitive sensors, a power supply coupled to the isolation interface, a field-programmable gate-array firmware coupled to the isolation interface, and an application-specific integrated circuit coupled to the field-programmable gate-array firmware.Type: ApplicationFiled: November 29, 2022Publication date: March 30, 2023Inventors: Yaoling Pan, Patrick John Tae, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy N. Shang, Mikhail V. Taraboukhine, Charles R. Hardy, Sivasankar Nagarajan
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Patent number: 11545346Abstract: Capacitive sensors and capacitive sensing data integration for plasma chamber condition monitoring are described. In an example, a plasma chamber monitoring system includes a plurality of capacitive sensors, a capacitance digital converter, and an applied process server coupled to the capacitance digital converter, the applied process server including a system software. The capacitance digital converter includes an isolation interface coupled to the plurality of capacitive sensors, a power supply coupled to the isolation interface, a field-programmable gate-array firmware coupled to the isolation interface, and an application-specific integrated circuit coupled to the field-programmable gate-array firmware.Type: GrantFiled: March 6, 2020Date of Patent: January 3, 2023Assignee: Applied Materials, Inc.Inventors: Yaoling Pan, Patrick John Tae, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy N. Shang, Mikhail V. Taraboukhine, Charles R. Hardy, Sivasankar Nagarajan
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Publication number: 20220272278Abstract: Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.Type: ApplicationFiled: February 9, 2022Publication date: August 25, 2022Inventors: Upendra Ummethala, Philip Kraus, Keith Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar, Shivaral Manjunath Nara, Anandakumar Parameshwarappa, Sivasankar Nagarajan, Dhirendra Kumar
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Patent number: 11284018Abstract: Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.Type: GrantFiled: September 15, 2020Date of Patent: March 22, 2022Assignee: Applied Materials, Inc.Inventors: Upendra Ummethala, Philip Kraus, Keith Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar, Shivaraj Manjunath Nara, Anandakumar Parameshwarappa, Sivasankar Nagarajan, Dhirendra Kumar
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Publication number: 20220086364Abstract: Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.Type: ApplicationFiled: September 15, 2020Publication date: March 17, 2022Inventors: Upendra Ummethala, Philip Kraus, Keith Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar, Shivaraj Manjunath Nara, Anandakumar Parameshwarappa, Sivasankar Nagarajan, Dhirendra Kumar
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Publication number: 20210280400Abstract: Capacitive sensors and capacitive sensing data integration for plasma chamber condition monitoring are described. In an example, a plasma chamber monitoring system includes a plurality of capacitive sensors, a capacitance digital converter, and an applied process server coupled to the capacitance digital converter, the applied process server including a system software. The capacitance digital converter includes an isolation interface coupled to the plurality of capacitive sensors, a power supply coupled to the isolation interface, a field-programmable gate-array firmware coupled to the isolation interface, and an application-specific integrated circuit coupled to the field-programmable gate-array firmware.Type: ApplicationFiled: March 6, 2020Publication date: September 9, 2021Inventors: Yaoling Pan, Patrick John Tae, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy N. Shang, Mikhail V. Taraboukhine, Charles R. Hardy, Sivasankar Nagarajan