Abstract: A confinement ring for use in a plasma processing chamber includes a lower horizontal section, a vertical section, and a upper horizontal section. The lower horizontal section extends between an inner lower radius and an outer radius of the confinement ring, and includes an extension section that extends vertically downward at the inner lower radius. A plurality of slots is defined in the lower horizontal section, wherein each slot extends radially from an inner diameter to an outer diameter along the lower horizontal section. An inner slot radius of each slot at the inner diameter is defined to be less than an outer slot radius at the outer diameter. The upper horizontal section extends between an inner upper radius and the outer radius of the confinement ring, and the vertical section integrally continues the lower horizontal section to the upper horizontal section at the outer radius of the confinement ring.

Abstract: Provided are a system and method for processing a beam position monitor signal using an analog-to-digital converter (ADC) sampler corresponding to an analog part and an FPGA corresponding to a digital signal processing part. The ADC sampler measures signal intensity through an optimization of an ADC sampling rate and bits using a radio frequency (RF) switch and a low noise amplifier (LNA), and converts an analog signal into a digital signal. The FPGA extracts only an optimized harmonic signal among multiple harmonic signals of the digital signal converted by the ADC sampler, through a digital band pass filter; and performs beam position measurement, beam phase measurement and relative beam current measurement on the extracted digital signal through a digital circuit.

Abstract: Disclosed are a system and method for processing a beam position monitor signal. The system includes an analog-to-digital converter (ADC) sampler configured to measure signal intensity through the optimization of an ADC sampling rate and bits using a radio frequency (RF) switch and a low noise amplifier (LNA) and to convert an analog signal into a digital signal and an FPGA configured to perform digital signal processing. The FPGA is further configured to include a digital signal synthesizer configured to extract only an optimized harmonic signal of multiple harmonic signals of the digital signal converted by the ADC sampler through a digital band pass filter so that the multiple harmonic signals are separated and signal processing is performed for each harmonics, and an IQ calculator configured to perform beam position measurement, beam position measurement and relative beam current measurement on the extracted digital signal through a digital circuit.