Patents by Inventor Sjaak Jacobus Johannes Beulens

Sjaak Jacobus Johannes Beulens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer rack provided with a gas distribution device
    Publication number: 20010011424
    Abstract: Wafer rack consisting of a carrier frame provided with accommodations for at least two wafers. To provide uniform distribution of gas over said wafers a gas distribution device is fitted at least above each wafer, which gas distribution device is connected to the gas supply for the reactor in which the wafer rack is placed. Connection to such a gas supply can be via coupling of the wafer rack to a part of said reactor.
    Type: Application
    Filed: April 3, 2001
    Publication date: August 9, 2001
    Inventor: Sjaak Jacobus Johannes Beulens
  • Wafer rack provided with a gas distribution device
    Patent number: 6209221
    Abstract: Wafer rack consisting of a carrier frame provided with accommodations for at least two wafers. To provide uniform distribution of gas over said wafers a gas distribution device is fitted at least above each wafer, which gas distribution device is connected to the gas supply for the reactor in which the wafer rack is placed. Connection to such a gas supply can be via coupling of the wafer rack to a part of said reactor.
    Type: Grant
    Filed: May 14, 1999
    Date of Patent: April 3, 2001
    Assignee: ASM International N.V.
    Inventor: Sjaak Jacobus Johannes Beulens