Abstract: Imaging systems and methods for imaging using the same color or monochromatic image sensor, wherein imaging can be switched between at least two imaging modes, for example between a visible imaging mode and an IR imaging mode, without moving any system component from a given position in an optical path between an imaged object and the image sensor. In an example, a system includes an image sensor, a tunable spectral filter and a multi-bandpass filter, the tunable spectral filter and the multi-bandpass filter arranged in a common optical path between an object and the image sensor, and a controller configured and operable to position the tunable spectral filter in a plurality of operation states related to a plurality of imaging modes.

Abstract: Tunable MEMS etalon devices comprising: a front minor and a back mirror, the front and back mirrors separated in an initial pre-stressed un-actuated etalon state by a gap having a pre-stressed un-actuated gap size determined by a back stopper structure in physical contact with the front mirror and back mirrors, the etalon configured to assume at least one actuated state in which the gap has an actuated gap size gap greater than the pre-stressed un-actuated gap size; an anchor structure, a frame structure fixedly coupled to the front mirror at a first surface thereof that faces incoming light, and a flexure structure attached to the anchor structure and to the frame structure but not attached to the front mirror, and a spacer structure separating the anchor structure from the back mirror, and wherein the front mirror and the spacer structure are formed in a same single glass layer.

Abstract: Devices with tilting plates, in particular tilting mirror plates, having improved dynamic flatness and shock resistance and methods for forming and operating such devices. A mirror device includes a minor plate operative to perform a tilt motion around a mirror tilt axis and an elastic foundation which provides distributed support to the minor plate. In an embodiment, the minor plate and the elastic foundation are formed in a single silicon-on-insulator (SOI) wafer. In another embodiment, the minor plate and the elastic foundation are formed in separate SOI wafers. The elastic foundation may include spiral or serpentine or any other appropriate shaped springs distributed uniformly or non-uniformly between the minor plate and a base.

Abstract: An electromechanical tilting device including a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension defining a tilt-containing motion path for the second structure with respect to the first structure. The motion path is selected to cause changes in overlapping regions and overlapping regions' gaps of the interdigitated electrodes. The device is configured such that an increase in one or more voltage bias applied to interdigitated driving electrodes makes a decrease in a total area of overlapping regions of the driving electrodes electrically energetically favorable.

Abstract: An electromechanical tilting device including a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension defining a tilt-containing motion path for the second structure with respect to the first structure. The motion path is selected to cause changes in overlapping regions and overlapping regions' gaps of the interdigitated electrodes. The device is configured such that an increase in one or more voltage bias applied to interdigitated driving electrodes makes a decrease in a total area of overlapping regions of the driving electrodes electrically energetically favorable.

Abstract: An optical device is presented for use in modulation of light and/or in sensing an external field, by at least partially, directly or indirectly exposing the device to the controllable or unknown external field. The device comprises a waveguide structure configured to define at least a first light channel having a light input and a light output, and having a first deformable resonating structure. The device thereby allows exposure of said at least first channel to the external field of the kind affecting a deformation of the first resonant structure thus causing a change in the first resonant wavelength, resulting in a corresponding change in at least one parameter of light output from said first channel, said change in the output light parameter being indicative of the external field.

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.

Abstract: An optical device is presented for use in modulation of light and/or in sensing an external field, by at least partially, directly or indirectly exposing the device to the controllable or unknown external field. The device comprises a waveguide structure configured to define at least a first light channel having a light input and a light output, and having a first deformable resonating structure. The device thereby allows exposure of said at least first channel to the external field of the kind affecting a deformation of the first resonant structure thus causing a change in the first resonant wavelength, resulting in a corresponding change in at least one parameter of light output from said first channel, said change in the output light parameter being indicative of the external field.

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis, and a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. The bouncing mechanism includes an element chosen to impart an overall nonlinear stiffness to the system and is selected from the group of elements consisting of a bouncer and a pre-curved nonlinear stiffness element.

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis, and a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. The bouncing mechanism includes an element chosen to impart an overall nonlinear stiffness to the system and is selected from the group of elements consisting of a bouncer and a pre-curved nonlinear stiffness element.

Abstract: Magnetically and electromagnetically driven MEMS devices for reflecting light signals and for switching radio frequency (RF) signals are provided. In a preferred embodiment, a light reflecting device such as a mirror or micro-scanner comprises a plate operative to reflect light and at least two conductive flexural actuators connected to the plate and to a substrate and operative to impart a rotation or tilt motion to the plate under a force arising from the interaction of a current passing through the conductive flexural actuators and a magnetic field parallel to the substrate. An RF switch comprises a substrate and a membrane having a longitudinal dimension and a lateral dimension, the membrane positioned substantially parallel to and attached to the substrate and operative to provide at least two switching positions in response to actuation by a Lorenz force acting on it.

Abstract: A MEMS variable optical attenuator (VOA) comprises at least one semitransparent refraction-mode shutter having a wedge shape and operative to attenuate an optical beam transmitted from a first optical fiber to a second optical fiber using refraction of the beam, and an actuator operative to position the shutter in the path of the beam. Optionally, the VOA further comprises a locking mechanism for locking the shutter after actuation, and at least one damper connected to the shutter for shortening the VOA switching time. The actuator may include in various embodiments a folding suspension with straight or curved springs, some springs interacting electrostatically with one or more side electrodes to provide an essentially linear dependence of shutter movement on actuation voltage.

Abstract: A RF switch comprises a substrate having two RF traces separated by a first gap, and coplanar ground traces separated from tile RF traces by a second gap, a membrane substantially parallel to the substrate and incorporating a conductive bridge, and an electrical mechanism for bringing the bridge into contact with the RF and ground traces, and for spacing the bridge apart from these traces. The membrane flexes in a membrane mode toward and away from the traces, providing extremely fast switching. A series configuration includes the bridge shorting the two RF traces, and a shunt configuration includes the bridge shorting the RF and aground traces. A separate embodiment provides a membrane vertical to the substrate and flexing in a direction parallel to it.