Patent number: 8299286
Abstract: A ?-diketonate alkoxide metal compound and a source reagent composition are provided. The ?-diketonate alkoxide metal compound may include a metal M selected from Mg, Ca, Sr, Ba, Sc, Y, La, Ce, Ti, Zr, Hf, Pr, V, Nb, Ta, Nd, Cr, W, Pm, Mn, Re, Sm, Fe, Ru, Eu, Co, Rh, Ir, Gd, Ni, Tb, Cu, Dy, Ho, Al, Tl, Er, Sn, Pb, Tm, Bi, Lu, Th, Pd, Pt, Ga, In, Au, Ag, Li, Na, K, Rb, Cs, Mo, and Yb. The metal may be complexed to at least one alkoxide ligand and one ?-diketonate ligand.
Type:
Grant
Filed:
December 4, 2007
Date of Patent:
October 30, 2012
Assignee:
Advanced Technology Materials, Inc.
Inventors:
Robin A. Gardiner, Thomas H. Baum, Douglas Cameron Gordon, Connie L. Gordon, legal representative, Timothy E. Glassman, Sofia Pombrik, Brian A. Vaartstra, Peter S. Kirlin