Patents by Inventor Sohaila Shooshtarian

Sohaila Shooshtarian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Localized heating and cooling of substrates
    Patent number: 7037797
    Abstract: The present invention is directed to an apparatus and process for locally heating and/or cooling of semiconductor wafers in thermal processing chambers. In particular, the apparatus of the present invention includes a device for heating or cooling localized regions of a wafer to control the temperature of such regions during one or more stages of a heat cycle. In one embodiment, gas nozzles eject gas towards the bottom of the wafer to provide localized temperature control. In another embodiment, a transparent gas pipe containing a variety of gas outlets distributes gas onto the top surface of the wafer to provide localized temperature control.
    Type: Grant
    Filed: March 17, 2000
    Date of Patent: May 2, 2006
    Assignee: Mattson Technology, Inc.
    Inventors: Sohaila Shooshtarian, Narasimha Acharya, Mike Elbert, Andreas Tillmann, Dieter Zernickel