Abstract: Systems and methods are described, and one method includes providing an optical fiber extending into a chamber with a volume of the gas; passing an optical beam, from an optical source, through the optical fiber; applying a spectral analysis to the optical beam as received after passing through the optical fiber, and outputting a corresponding spectral analysis signal; and determining, based on the output spectral analysis signal, whether a liquid is carried by the volume of the gas.

Abstract: Systems and methods are described, and one method includes providing an optical fiber extending into a chamber with a volume of the gas; passing an optical beam, from an optical source, through the optical fiber; applying a spectral analysis to the optical beam as received after passing through the optical fiber, and outputting a corresponding spectral analysis signal; and determining, based on the output spectral analysis signal, whether a liquid is carried by the volume of the gas.

Abstract: Systems and methods are described, and one method includes passing an optical beam through a volume of the gas to a reception surface, applying spectroanalysis to the optical beam received at the reception surface, and determining from the spectroanalysis whether a liquid is carried by the volume of the gas.

Abstract: Systems and methods are described, and one method includes passing an optical beam through a volume of the gas to a reception surface, applying spectroanalysis to the optical beam received at the reception surface, and determining from the spectroanalysis whether a liquid is carried by the volume of the gas.

Abstract: A new method and apparatus is described for measurement of the dew point, and thus the vapor pressure of various gases and gas mixtures. In this method an optical element which is exposed to a gas atmosphere is cooled while its temperature is being monitored. At the same time an optical signal is sent through the back of the optical element. The optical signal goes through internal reflections. As soon as dew forms on the surface of the element, the optical signal will exhibit selective absorption due to the interaction of the evanescent tail of the optical signal and based on the chemical nature of the condensate. This invention can also be used to characterize condensable content of gas mixtures. The method allows for the spectral characterization and determination of the condensed vapor. It offers several advantages over existing methods.

Abstract: An optical spectrometer uses a tapered Fabry-Perot type variable optical filter in conjunction with an optical detector array. The filter can be a long-pass, short-pass, or narrow bandpass filter. The stability of the variable optical filter allows high resolution, depending on the number and spacing of the detectors used. In a further embodiment, signal-processing techniques are used to enhance the resolution of the spectrometer beyond the measured response.

Abstract: An optical spectrometer uses a tapered Fabry-Perot type linear variable optical filter in conjunction with an optical detector array. The filter can be a long-pass, short-pass, or narrow bandpass filter. The stability of the variable optical filter allows high resolution, depending on the number and spacing of the detectors used. In a further embodiment, signal-processing techniques are used to enhance the resolution of the spectrometer beyond the measured response.

Abstract: A gas purged counter-electrode prevents the counter-electrode from being covered with dielectric material by flowing gas past a surface of a metal element. The gas purged counter-electrode produces a relatively high-density plasma which effectively acts as the counter-electrode for a coating system. The gas purged counter-electrodes can be used with PECVD or sputtering systems.

Abstract: The present invention is a cascade control system for reactive sputtering deposition. A first control loop modifies the power supply in order to keep a monitored value nearly constant. This first control loop can be done relatively quickly. A second control loop monitors a second measure parameter in order to control the reactive gas flow to the system. In a preferred embodiment, the slower control loop is used to maintain a relatively constant power at the power supply.