Patents by Inventor Solar-semi GmbH

Solar-semi GmbH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PLATE
    Publication number: 20130189439
    Abstract: A device for lacquering or coating a substrate is disclosed. The device includes a substrate plate configured to accommodate said substrate, and one or more suction points connected to, and extending upwardly from, the substrate plate. The one or more suction points may be configured to provide a vacuum to said substrate.
    Type: Application
    Filed: January 3, 2013
    Publication date: July 25, 2013
    Applicant: solar-semi GmbH
    Inventor: solar-semi GmbH
  • DEVICE FOR MACHINING A SUBSTRATE AND A METHOD FOR THIS PURPOSE
    Publication number: 20130140274
    Abstract: In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap.
    Type: Application
    Filed: November 30, 2012
    Publication date: June 6, 2013
    Applicant: SOLAR-SEMI GMBH
    Inventor: Solar-semi GmbH