Patents by Inventor Somesh Challapalli

Somesh Challapalli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for determining defects using physics-based image perturbations
    Patent number: 11676264
    Abstract: A system for characterizing a specimen is disclosed. In one embodiment, the system includes a characterization sub-system configured to acquire one or more images a specimen, and a controller communicatively coupled to the characterization sub-system. The controller may be configured to: receive from the characterization sub-system one or more training images of one or more defects of a training specimen; generate one or more augmented images of the one or more defects of the training specimen; generate a machine learning classifier based on the one or more augmented images of the one or more defects of the training specimen; receive from the characterization sub-system one or more target images of one or more target features of a target specimen; and determine one or more defects of the one or more target features with the machine learning classifier.
    Type: Grant
    Filed: July 21, 2020
    Date of Patent: June 13, 2023
    Assignee: KLA Corporation
    Inventors: Martin Plihal, Saravanan Paramasivam, Jacob George, Niveditha Lakshmi Narasimhan, Sairam Ravu, Somesh Challapalli, Prasanti Uppaluri
  • System and Method for Determining Defects Using Physics-Based Image Perturbations
    Publication number: 20210027445
    Abstract: A system for characterizing a specimen is disclosed. In one embodiment, the system includes a characterization sub-system configured to acquire one or more images a specimen, and a controller communicatively coupled to the characterization sub-system. The controller may be configured to: receive from the characterization sub-system one or more training images of one or more defects of a training specimen; generate one or more augmented images of the one or more defects of the training specimen; generate a machine learning classifier based on the one or more augmented images of the one or more defects of the training specimen; receive from the characterization sub-system one or more target images of one or more target features of a target specimen; and determine one or more defects of the one or more target features with the machine learning classifier.
    Type: Application
    Filed: July 21, 2020
    Publication date: January 28, 2021
    Inventors: Martin Plihal, Saravanan Paramasivam, Jacob George, Niveditha Lakshmi Narasimhan, Sairam Ravu, Somesh Challapalli, Prasanti Uppaluri