Patents by Inventor Son Trihn

Son Trihn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluid delivery system and method
    Patent number: 6083321
    Abstract: The present invention generally provides a gas delivery system adapted for positioning near the process chamber. More particularly, the present invention provides an apparatus for processing a substrate that includes a process chamber and a gas delivery system. The gas delivery system is in fluid communication with and is adapted to supply one or more process gases and/or carrier/purge gases to the process chamber. The gas delivery system is positioned proximal the process chamber within about two to three feet of the process chamber.
    Type: Grant
    Filed: July 11, 1997
    Date of Patent: July 4, 2000
    Assignee: Applied Materials, Inc.
    Inventors: Lawrence Lei, Son Trihn, Joel M. Huston