Patents by Inventor Sonti Sreeram

Sonti Sreeram has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • GAS DISTRIBUTION SYSTEM AND REACTOR SYSTEM INCLUDING SAME
    Publication number: 20230313377
    Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas distribution system coupled to a reaction chamber.
    Type: Application
    Filed: June 8, 2023
    Publication date: October 5, 2023
    Inventors: Sonti Sreeram, Junwei Su, Loc Vinh Tran
  • Gas distribution system and reactor system including same
    Patent number: 11718913
    Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas distribution system coupled to a reaction chamber.
    Type: Grant
    Filed: June 4, 2018
    Date of Patent: August 8, 2023
    Assignee: ASM IP Holding B.V.
    Inventors: Sonti Sreeram, Junwei Su, Loc Vinh Tran
  • Temperature-controlled flange and reactor system including same
    Patent number: 11168395
    Abstract: A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.
    Type: Grant
    Filed: March 11, 2020
    Date of Patent: November 9, 2021
    Assignee: ASM IP Holding B.V.
    Inventors: Sonti Sreeram, John Tolle, Joe Margetis, Junwei Su
  • TEMPERATURE-CONTROLLED FLANGE AND REACTOR SYSTEM INCLUDING SAME
    Publication number: 20200224309
    Abstract: A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.
    Type: Application
    Filed: March 11, 2020
    Publication date: July 16, 2020
    Inventors: Sonti Sreeram, John Tolle, Joe Margetis, Junwei Su
  • Temperature-controlled flange and reactor system including same
    Patent number: 10612136
    Abstract: A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: April 7, 2020
    Assignee: ASM IP HOLDING, B.V.
    Inventors: Sonti Sreeram, John Tolle, Joe Margetis, Junwei Su
  • TEMPERATURE-CONTROLLED FLANGE AND REACTOR SYSTEM INCLUDING SAME
    Publication number: 20200002811
    Abstract: A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.
    Type: Application
    Filed: June 29, 2018
    Publication date: January 2, 2020
    Inventors: Sonti Sreeram, John Tolle, Joe Margetis, Junwei Su
  • GAS DISTRIBUTION SYSTEM AND REACTOR SYSTEM INCLUDING SAME
    Publication number: 20190368041
    Abstract: A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas distribution system coupled to a reaction chamber.
    Type: Application
    Filed: June 4, 2018
    Publication date: December 5, 2019
    Inventors: Sonti Sreeram, Junwei Su, Loc Vinh Tran