Abstract: A system for providing six-dimensional position data of an object in a three-dimensional (3D) space, the system including a light source configured to emit a light beam in an x-direction, a mirror including a mirror plane disposed in an x-y plane and a beam splitter configured for reflecting the light beam from the light source onto the mirror before being directed to the object, the light beam reflected by the object onto the beam splitter before being directed through a lens to an image plane to form an image.

Abstract: A system for providing an object distance of a device under test (DUT), the system including a first lens, a second lens, an optical pinhole disposed between the first lens and the second lens, a detector and a pair of gratings disposed between the second lens and the detector, the detector configured for receiving a Moiré pattern formed as a result of light from the DUT being disposed through the first lens, the optical pinhole, the second lens and the pair of gratings, wherein the object distance is determined based on the Moiré pattern and one or more properties of the pair of gratings.

Abstract: A method for providing an object distance of a device under test (DUT) using a system including a first lens, a second lens, an optical pinhole disposed between the first lens and the second lens, a detector, a pair of gratings disposed between the second lens and the detector, the detector configured for receiving a Moiré pattern formed as a result of light from of the DUT being disposed through the first lens, the optical pinhole, the second lens and the pair of gratings, the method including obtaining the Moiré pattern using the detector and determining the object distance based on the Moiré pattern and one or more properties of the pair of gratings.