Patents by Inventor Sowjanya Musunuru

Sowjanya Musunuru has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • STRESS TREATMENTS FOR COVER WAFERS
    Publication number: 20230069395
    Abstract: Exemplary methods of manufacturing a semiconductor cover wafer may include sintering aluminum nitride particles into a substrate characterized by a thickness and characterized by a disc shape. The methods may include grinding a surface of the substrate to reduce the thickness to less than or about 2 mm. The methods may include polishing the surface of the substrate to reduce a roughness. The methods may include annealing the substrate at a temperature of greater than or about 800° C. for a time period of greater than or about 60 minutes.
    Type: Application
    Filed: August 30, 2021
    Publication date: March 2, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Vinayak Vishwanath Hassan, Bhaskar Kumar, Meng Cai, Sowjanya Musunuru, Kaushik Alayavalli, Andrew Nguyen