Patents by Inventor Sreeram Balasubramanian

Sreeram Balasubramanian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF MAKING HIGH PURITY POLYCRYSTALLINE ALUMINUM OXYNITRIDE BODIES USEFUL IN SEMICONDUCTOR PROCESS CHAMBERS
    Publication number: 20150115507
    Abstract: A method of making high purity crystalline AlON bodies by synthesizing and calcining AlON powders having less than 80 ppm Si, Mg, Ca, Na, and K impurities. The AION powders are milled to reduce the particle size of the AlON powders using a high purity milling media. An AlON body is formed from the milled AlON powders. Such AlON bodies are particularly suitable for semiconductor process chamber components.
    Type: Application
    Filed: October 23, 2014
    Publication date: April 30, 2015
    Inventors: Suri A. Sastri, Sreeram Balasubramanian, Lee M. Goldman