Abstract: Techniques regarding nanofluidic chips with a plurality of inlets and/or outlets in fluid communication with one or more nanoDLD arrays are provided. For example, one or more embodiments described herein can comprise a nanoscale deterministic lateral displacement array between and in fluid communication with a global inlet and a global outlet. The nanoscale deterministic lateral displacement array can further be between and in fluid communication with a local inlet and a local outlet. Also, the nanoscale deterministic lateral displacement array can laterally displace a particle comprised within a sample fluid supplied from the global inlet to a collection region that directs the particle to the local outlet. An advantage of such an apparatus can be the expanded versatility of the nanoscale deterministic lateral displacement array for sample preparation applications involving nanoparticles not accessible to other higher throughput microscale microfluidic technologies.

Abstract: An apparatus is provided. The apparatus may comprise a layer of a microfluidic chip. The layer may comprise a nanoscale deterministic lateral displacement (nanoDLD) array. The nanoDLD array may comprise a plurality of pillars arranged in a plurality of columns. Further, the nanoDLD array may separate particles from a purified fluidic sample associated with a bodily materials of an organism. A method for purifying at least one target particle from a sample by utilizing a sized-based separation is provided. The method may include detecting the at least one target particle associated with the sample, by utilizing at least one detector molecule in a nanoDLD array. The method may then include separating the detected at least one target particle and the at least one detector molecule from a bump fraction in the sample based on a size of the detected at least one target particle.

Abstract: A method of producing a bonded chip stack is described. A first nanofluidic device chip having a first through-wafer via is formed. A second nanofluidic device chip having a second through-wafer via is formed. The first nanofluidic device chip and the second nanofluidic device chip are washed with a detergent solution. A first surface of the first nanofluidic device chip and a second surface of the second nanofluidic device chip are activated by treating the first surface and the second surface with an activation solution. The first nanofluidic device chip and the second nanofluidic device chip are arranged in a stack. The first through-wafer via is aligned with the second through-wafer via in a substantially straight line. The stack of first and second nanofluidic device chips is subjected to annealing conditions.

Abstract: An exemplary method includes forming a sacrificial layer along sidewalls of an array of trenches that are indented into a substrate, depositing a fill layer over the sacrificial layer, and then creating an array of gaps between the fill layer and the substrate by removing the sacrificial layer along the sidewalls of the trenches, while maintaining a structural connection between the substrate and the fill layer at the floors of the trenches. The method further includes covering the substrate, the fill layer, and the gaps with a cap layer that seal fluid-tight against the substrate and the fill layer. The method further includes indenting a first reservoir and a second reservoir through the cap layer, and into the substrate and the fill layer, across the lengths of the array of gaps, so that the array of gaps connects the first reservoir in fluid communication with the second reservoir.

Abstract: Devices and methods that can facilitate electrically conductive deterministic lateral displacement (DLD) pillar array components are provided. According to an embodiment, a device can comprise a substrate that can have a channel that can comprise electrically conductive pillar components that can be coupled to one or more electrodes. The device can further comprise a seal layer that can be coupled to the substrate that seals the one or more electrodes.

Abstract: Techniques regarding one or more structures that can facilitate automated, multi-stage processing of one or more nanofluidic chips are provided. For example, one or more embodiments described herein can comprise a system, which can comprise a roller positioned adjacent to a microfluidic card comprising a plurality of fluid reservoirs in fluid communication with a plurality of nanofluidic chips. An arrangement of the plurality of nanofluidic chips on the microfluidic card can defines a processing sequence driven by a translocation of the roller across the microfluidic card.

Abstract: Techniques regarding one or more structures for checking the via formation are provided. For example, one or more embodiments described herein can comprise an apparatus, which can comprise a microfluidic channel positioned on a silicon substrate. The apparatus can also comprise a pattern of material comprised within the microfluidic channel and positioned on a surface of the silicon substrate. Further, the pattern of material can define a future location of a through-silicon via. An advantage of such an apparatus can be that the pattern of material can facilitate checking whether the through-silicon via is fully or partially formed.

Abstract: Devices and methods that can facilitate electrically conductive deterministic lateral displacement (DLD) pillar array components are provided. According to an embodiment, a device can comprise a substrate that can have a channel that can comprise electrically conductive pillar components that can be coupled to one or more electrodes. The device can further comprise a seal layer that can be coupled to the substrate that seals the one or more electrodes.

Abstract: Techniques regarding integrated purification-detection devices for detecting one or more biomarkers are provided. For example, one or more embodiments described herein are directed to an apparatus, comprising a housing and a microfluidic chip contained within the housing. The microfluidic chip comprises a separation unit that separates, using one or more nano deterministic lateral displacement (nanoDLD) arrays, target biological entities having a defined size range from other biological entities included in a biological fluid sample. The microfluidic chip further comprises a detection unit that facilitates detecting presence of one or more biomarkers associated with the target biological entities using one or more detection molecules or macromolecules that chemically reacts with the one or more biomarkers.

Abstract: Techniques regarding nanofluidic chips with a plurality of inlets and/or outlets in fluid communication with one or more nanoDLD arrays are provided. For example, one or more embodiments described herein can comprise a nanoscale deterministic lateral displacement array between and in fluid communication with a global inlet and a global outlet. The nanoscale deterministic lateral displacement array can further be between and in fluid communication with a local inlet and a local outlet. Also, the nanoscale deterministic lateral displacement array can laterally displace a particle comprised within a sample fluid supplied from the global inlet to a collection region that directs the particle to the local outlet. An advantage of such an apparatus can be the expanded versatility of the nanoscale deterministic lateral displacement array for sample preparation applications involving nanoparticles not accessible to other higher throughput microscale microfluidic technologies.

Abstract: Multistage deterministic lateral displacement devices, methods of forming the devices, and methods of separating a fluid mixture including particles having three or more particle sizes generally include a first module and at least one additional module. Each module includes a condenser portion and a separate portion. The condenser portion is generally configured to focus a streamline of all particles to a center of a channel whereas the separator separates the streamline of all particles into two different streamlines. One of the streamlines focuses the largest particles in the fluid mixture along a sidewall of the channel and the other streamline of smaller particles is between opposing sidewalls that define the channel. Each additional module can be used to further separate the largest particles remaining in the fluid mixture from the smaller particles.

Abstract: Techniques regarding detecting one or more defined nucleic acid sequences are provided. For example, one or more embodiments described herein can comprise a method, which can comprise adding a molecular probe to a sample fluid comprising a first deoxyribonucleic acid segment and a second deoxyribonucleic acid segment. The molecular probe can have an affinity to bond to a defined nucleic acid sequence. The method can also comprise separating, via a nanoscale deterministic lateral displacement array, the first deoxyribonucleic acid segment from the second deoxyribonucleic acid segment based on a size of the first deoxyribonucleic acid segment.

Abstract: Techniques regarding screening for mutations using nanoscale deterministic arrays are provided. For example, one or more embodiments described herein can comprise a method, which can comprise cleaving a deoxyribonucleic acid segment hybridized with a molecular probe to form a sample fluid. The cleaving can occur at a first end and a second end of the molecular probe. Also, the cleaving can comprise a cleaving agent that targets base pair mismatches. The method can also comprise supplying the sample fluid to a nanoscale deterministic lateral displacement array to screen for a single nucleotide polymorphism.

Abstract: A method of purifying nucleic acid polymers for next generation sequencing includes loading a mixture of adapter ligated, fragmented nucleic acid polymers onto a nano-deterministic lateral displacement (nanoDLD) array. The mixture includes a first adapter ligated, fragmented nucleic acid polymer, a second adapter ligated, fragmented nucleic acid polymer, and a contaminant. The method further includes flowing the mixture through the nanoDLD array to separate the first adapter ligated, fragmented nucleic acid polymer from the second adapter ligated, fragmented nucleic acid polymer, and each of the first and second adapter ligated, fragmented nucleic acid polymers from the contaminant.

Abstract: A fluidic processor device and a wafer including the same, the device including a nanofluidic separator chip including a nanoDLD array, a housing for housing the chip including a top plate disposed on a topside of the chip, a bottom plate disposed on a backside of the chip and fastened to the top plate, and a spacer disposed between the chip and the bottom plate to create a clearance between the chip and the bottom plate for forming a drain space on the backside of the chip.