Patents by Inventor Stanley Wu
Stanley Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240105525Abstract: Test structures and methods of testing pixel driver chip donor wafers are described. In an embodiment, a redistribution layer is formed over a pixel driver chip donor wafer and probed to determine known good dies, followed by removal of the RDL. In other embodiments, test routing is formed in the pixel driver chip using a polycide material or doped region in the semiconductor wafer.Type: ApplicationFiled: July 25, 2023Publication date: March 28, 2024Inventors: Imran Hashim, Xiang Lu, Stanley B. Wang, Xuchun Liu, Mahdi Farrokh Baroughi, Yongjie Jiang, Hopil Bae, Hasan Akyol, Baris Posat, John T. Wetherell, Lei Wu
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Patent number: 11866821Abstract: Embodiments of the present disclosure generally relate to an apparatus and a method for cleaning a processing chamber. In one embodiment, a substrate support cover includes a bulk member coated with a fluoride coating. The substrate support cover is placed on a substrate support disposed in the processing chamber during a cleaning process. The fluoride coating does not react with the cleaning species. The substrate support cover protects the substrate support from reacting with the cleaning species, leading to reduced condensation formed on chamber components, which in turn leads to reduced contamination of the substrate in subsequent processes.Type: GrantFiled: March 2, 2020Date of Patent: January 9, 2024Assignee: Applied Materials, Inc.Inventors: Shuran Sheng, Lin Zhang, Jiyong Huang, Joseph C. Werner, Stanley Wu, Mahesh Adinath Kanawade, Yikai Chen, Yixing Lin, Ying Ma
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Publication number: 20230326780Abstract: A body of an electrostatic chuck comprises mesas disposed on a polished surface of the body. Each of the mesas comprises an adhesion layer disposed on the polished surface of the body, a transition layer disposed over the adhesion layer, and a coating layer disposed over the transition layer. The coating layer has a hardness of at least 14 GPa. The body further comprises a sidewall coating disposed over a sidewall of the body. A method for preparing the body comprises polishing the surface of the body and cleaning the polished surface. The method further comprises depositing the mesas by depositing the adhesion layer on the body, the transition layer over the adhesion layer, and the coating layer over the transition layer. Further, the method includes, polishing the mesas.Type: ApplicationFiled: June 7, 2023Publication date: October 12, 2023Inventors: Wendell Glenn BOYD, Jr., Stanley WU, Matthew BOYD
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Publication number: 20230238267Abstract: Methods and apparatus reduce chucking abnormalities for electrostatic chucks by ensuring proper planarizing of ceramic surfaces of the electrostatic chuck. In some embodiments, a method for planarizing an upper ceramic surface of an electrostatic chuck assembly may comprise placing the electrostatic chuck assembly in a first planarizing apparatus, altering an upper ceramic surface of the electrostatic chuck assembly, and halting the altering of the upper ceramic surface of the electrostatic chuck assembly when an Sa parameter is less than approximately 0.1 microns, an Sdr parameter is less than approximately 2.5 percent, an Sz parameter is less than approximately 10 microns for any given area of approximately 10 mm2 of the upper ceramic surface, or a pit-porosity depth parameter of greater than 1 micron is less than approximately 0.1 percent of area of the upper ceramic surface.Type: ApplicationFiled: January 26, 2022Publication date: July 27, 2023Inventors: Ramesh GOPALAN, Robert Toshiharu HIRAHARA, Stanley WU, Michael Prestoza DECENA, Wendell BOYD, Siamak SALIMIAN, Thomas BREZOCZKY
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Publication number: 20230229677Abstract: A data linking system is described herein that links data records corresponding to a particular real estate property even if there are inconsistencies in the data records, the physical presence of the real estate property has changed over time, and/or the data records use different terminology. In some cases the data records are matched using a trained machine learning model. The data linking system can optionally generate a visualization of the data record linkage via interactive user interfaces. By linking data records despite the issues described above, the data linking system reduces the number of navigational steps a user performs to obtain data associated with a property and/or reduces data processing times. The disclosed system may be used to generate and maintain a comprehensive database of substantially all properties within a jurisdiction, in which a unique identifier is assigned to each property.Type: ApplicationFiled: May 24, 2022Publication date: July 20, 2023Inventors: Jia Guo, Jacques Truong, Pallavi Wankhede, Susanna Park, Patrick Jacolenne, Aaron Robert Wepler, Stanley Wu
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Patent number: 11699611Abstract: A body of an electrostatic chuck comprises mesas disposed on a polished surface of the body. Each of the mesas comprises an adhesion layer disposed on the polished surface of the body, a transition layer disposed over the adhesion layer, and a coating layer disposed over the transition layer. The coating layer has a hardness of at least 14 Gpa. The body further comprises a sidewall coating disposed over a sidewall of the body. A method for preparing the body comprises polishing the surface of the body and cleaning the polished surface. The method further comprises depositing the mesas by depositing the adhesion layer on the body, the transition layer over the adhesion layer, and the coating layer over the transition layer. Further, the method includes, polishing the mesas.Type: GrantFiled: February 23, 2021Date of Patent: July 11, 2023Assignee: Applied Materials, Inc.Inventors: Wendell Glenn Boyd, Jr., Stanley Wu, Matthew Boyd
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Publication number: 20220358607Abstract: A data linking system is described herein that links data records corresponding to a particular real estate property even if there are inconsistencies in the data records, the physical presence of the real estate property has changed over time, and/or the data records use different terminology. In some cases the data records are matched using a trained machine learning model. The data linking system can optionally generate a visualization of the data record linkage via interactive user interfaces. By linking data records despite the issues described above, the data linking system reduces the number of navigational steps a user performs to obtain data associated with a property and/or reduces data processing times. The disclosed system may be used to generate and maintain a comprehensive database of substantially all properties within a jurisdiction, in which a unique identifier is assigned to each property.Type: ApplicationFiled: May 24, 2022Publication date: November 10, 2022Inventors: Jia Guo, Jacques Truong, Pallavi Wankhede, Susanna Park, Patrick Jacolenne, Aaron Robert Wepler, Stanley Wu
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Publication number: 20220270907Abstract: A body of an electrostatic chuck comprises mesas disposed on a polished surface of the body. Each of the mesas comprises an adhesion layer disposed on the polished surface of the body, a transition layer disposed over the adhesion layer, and a coating layer disposed over the transition layer. The coating layer has a hardness of at least 14 Gpa. The body further comprises a sidewall coating disposed over a sidewall of the body. A method for preparing the body comprises polishing the surface of the body and cleaning the polished surface. The method further comprises depositing the mesas by depositing the adhesion layer on the body, the transition layer over the adhesion layer, and the coating layer over the transition layer. Further, the method includes, polishing the mesas.Type: ApplicationFiled: February 23, 2021Publication date: August 25, 2022Inventors: Wendell Glenn BOYD, JR., Stanley WU, Matthew BOYD
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Patent number: 11372900Abstract: A data linking system is described herein that links data records corresponding to a particular real estate property even if there are inconsistencies in the data records, the physical presence of the real estate property has changed over time, and/or the data records use different terminology. In some cases the data records are matched using a trained machine learning model. The data linking system can optionally generate a visualization of the data record linkage via interactive user interfaces. By linking data records despite the issues described above, the data linking system reduces the number of navigational steps a user performs to obtain data associated with a property and/or reduces data processing times. The disclosed system may be used to generate and maintain a comprehensive database of substantially all properties within a jurisdiction, in which a unique identifier is assigned to each property.Type: GrantFiled: November 21, 2018Date of Patent: June 28, 2022Inventors: Jia Guo, Jacques Truong, Pallavi Wankhede, Susanna Park, Patrick Jacolenne, Aaron Robert Wepler, Stanley Wu
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Patent number: 11373257Abstract: A data linking system is described herein that links data records corresponding to a particular real estate property even if there are inconsistencies in the data records, the physical presence of the real estate property has changed over time, and/or the data records use different terminology. In some cases the data records are matched using a trained machine learning model. The data linking system can optionally generate a visualization of the data record linkage via interactive user interfaces. By linking data records despite the issues described above, the data linking system reduces the number of navigational steps a user performs to obtain data associated with a property and/or reduces data processing times. The disclosed system may be used to generate and maintain a comprehensive database of substantially all properties within a jurisdiction, in which a unique identifier is assigned to each property.Type: GrantFiled: November 21, 2018Date of Patent: June 28, 2022Inventors: Jia Guo, Jacques Truong, Pallavi Wankhede, Susanna Park, Patrick Jacolenne, Aaron Robert Wepler, Stanley Wu
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Publication number: 20200370174Abstract: Embodiments of the present disclosure generally relate to an apparatus and a method for cleaning a processing chamber. In one embodiment, a substrate support cover includes a bulk member coated with a fluoride coating. The substrate support cover is placed on a substrate support disposed in the processing chamber during a cleaning process. The fluoride coating does not react with the cleaning species. The substrate support cover protects the substrate support from reacting with the cleaning species, leading to reduced condensation formed on chamber components, which in turn leads to reduced contamination of the substrate in subsequent processes.Type: ApplicationFiled: March 2, 2020Publication date: November 26, 2020Inventors: Shuran SHENG, Lin ZHANG, Jiyong HUANG, Joseph C. WERNER, Stanley WU, Mahesh Adinath KANAWADE, Yikai CHEN, Yixing LIN, Ying MA
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Patent number: 10763154Abstract: The present disclosure relates to a flexible support to aid in a measurement of flatness of a susceptor. The flexible support has a first support block having a substantially flat upper surface and a lower surface having a first aperture formed therein. The flexible support further has a second support block having a substantially flat lower surface and an upper surface having a second aperture formed therein. The flexible support further has a support pin configured to be receivable in the first aperture and the second aperture, the support pin configured to retain the first support block and the second support block in a spaced apart relation while allowing restricted motion of the first support block relative to the second support block via deformation of the support pin. The flexible support further has a guide disposed between the first support block and the second support block, the guide configured to allow the first support block and the second support block to move axially relative to the guide.Type: GrantFiled: August 28, 2018Date of Patent: September 1, 2020Assignee: APPLIED MATERIALS, INC.Inventors: Ying Ma, Yixi Tian, Shih Chang Chen, Jin Sun, Rodolfo Perez, Stanley Wu
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Patent number: 10662529Abstract: Techniques are disclosed for methods and apparatuses for reducing particle contamination formation in a high temperature processing chamber with a cooled gas feed block. The cooled gas feed has a body. The body has a main center portion having a top surface and a bottom surface. The body also has a flange extending outward from the bottom surface of the main center portion. A gas channel is disposed through the body. The gas channel has an inlet formed in the top surface of the main center portion and an outlet formed in the bottom surface of the main center portion. The body also has a center coolant channel. The center coolant channel has a first portion having an inlet formed in the top surface of the main center portion, and a second portion coupled to the first portion, the second portion having an outlet formed a sidewall of the flange.Type: GrantFiled: April 28, 2016Date of Patent: May 26, 2020Assignee: Applied Materials, Inc.Inventors: Govinda Raj, Hanish Kumar, Lin Zhang, Stanley Wu
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Publication number: 20200071823Abstract: The present disclosure relates to a flexible support to aid in a measurement of flatness of a susceptor. The flexible support has a first support block having a substantially flat upper surface and a lower surface having a first aperture formed therein. The flexible support further has a second support block having a substantially flat lower surface and an upper surface having a second aperture formed therein. The flexible support further has a support pin configured to be receivable in the first aperture and the second aperture, the support pin configured to retain the first support block and the second support block in a spaced apart relation while allowing restricted motion of the first support block relative to the second support block via deformation of the support pin. The flexible support further has a guide disposed between the first support block and the second support block, the guide configured to allow the first support block and the second support block to move axially relative to the guide.Type: ApplicationFiled: August 28, 2018Publication date: March 5, 2020Inventors: Ying MA, Yixi TIAN, Shih Chang CHEN, Jin SUN, Rodolfo PEREZ, Stanley WU
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Patent number: 10515843Abstract: The present disclosure generally relates to generally relates to equipment for performing semiconductor device fabrication, and more particularly, to a cover ring for partially covering a surface of a substrate support in high-density plasma chemical vapor deposition processing. In one embodiment, the cover ring may include an annular body, an inner support block with a beveled first edge for stability, one or more thermal breaks to increase thermal movement towards the outer diameter, a rounded shoulder to prevent particle deposition, an outer lip configured to a substrate support pedestal, a vertical appendage to support the substrate, and a thermally conductive coating disposed on the annular ring to direct thermal conductivity towards the outer edge of the ring and prevent particle accumulation.Type: GrantFiled: December 7, 2016Date of Patent: December 24, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Govinda Raj, Hanish Kumar Panavalappil Kumarankutty, Stanley Wu
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Publication number: 20190043744Abstract: A method and apparatus for monitoring substrate lift pin operation is disclosed and includes a support pedestal for a vacuum chamber, the support pedestal comprising a body having a plurality of openings formed between two major sides of the body, and a substrate support device disposed in each of the plurality of openings, each of the support devices comprising a housing disposed in the body, the housing having a bore formed therethrough, and a support pin disposed in the bore, wherein the body includes a monitoring device positioned proximal to the support pins of each of the substrate support devices.Type: ApplicationFiled: July 26, 2018Publication date: February 7, 2019Inventors: Tom K. CHO, Ali SALEHPOUR, Stanley WU, Ying MA
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Patent number: 10190701Abstract: Implementations described herein protect a chamber components from corrosive cleaning gases used at high temperatures. In one embodiment, a chamber component includes at least a bellows that includes a top mounting flange coupled to a bottom mounting flange by a tubular accordion structure. A coating is disposed on an exterior surface of at least the tubular accordion structure. The coating includes of at least one of polytetrafluoroethylene, parylene C, parylene D, diamond-like carbon (DLC), yttria stabilized zirconia, nickel, alumina, or aluminum silicon magnesium yttrium oxygen compound. In one embodiment, the chamber component is a valve having an internal bellows.Type: GrantFiled: April 6, 2016Date of Patent: January 29, 2019Assignee: Applied Materials, Inc.Inventors: Govinda Raj, Hanish Kumar, Lin Zhang, Stanley Wu
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Publication number: 20170191161Abstract: Techniques are disclosed for methods and apparatuses for reducing particle contamination formation in a high temperature processing chamber with a cooled gas feed block. The cooled gas feed has a body. The body has a main center portion having a top surface and a bottom surface. The body also has a flange extending outward from the bottom surface of the main center portion. A gas channel is disposed through the body. The gas channel has an inlet formed in the top surface of the main center portion and an outlet formed in the bottom surface of the main center portion. The body also has a center coolant channel. The center coolant channel has a first portion having an inlet formed in the top surface of the main center portion, and a second portion coupled to the first portion, the second portion having an outlet formed a sidewall of the flange.Type: ApplicationFiled: April 28, 2016Publication date: July 6, 2017Inventors: Govinda RAJ, Hanish KUMAR, Lin ZHANG, Stanley WU
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Publication number: 20170162422Abstract: The present disclosure generally relates to generally relates to equipment for performing semiconductor device fabrication, and more particularly, to a cover ring for partially covering a surface of a substrate support in high-density plasma chemical vapor deposition processing. In one embodiment, the cover ring may include an annular body, an inner support block with a beveled first edge for stability, one or more thermal breaks to increase thermal movement towards the outer diameter, a rounded shoulder to prevent particle deposition, an outer lip configured to a substrate support pedestal, a vertical appendage to support the substrate, and a thermally conductive coating disposed on the annular ring to direct thermal conductivity towards the outer edge of the ring and prevent particle accumulation.Type: ApplicationFiled: December 7, 2016Publication date: June 8, 2017Inventors: Govinda RAJ, Hanish Kumar PANAVALAPPIL KUMARANKUTTY, Stanley WU
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Publication number: 20170152968Abstract: Implementations described herein protect a chamber components from corrosive cleaning gases used at high temperatures. In one embodiment, a chamber component includes at least a bellows that includes a top mounting flange coupled to a bottom mounting flange by a tubular accordion structure. A coating is disposed on an exterior surface of at least the tubular accordion structure. The coating includes of at least one of polytetrafluoroethylene, parylene C, parylene D, diamond-like carbon (DLC), yttria stabilized zirconia, nickel, alumina, or aluminum silicon magnesium yttrium oxygen compound. In one embodiment, the chamber component is a valve having an internal bellows.Type: ApplicationFiled: April 6, 2016Publication date: June 1, 2017Applicants: Applied Materials, Inc., Applied Materials, Inc.Inventors: Govinda RAJ, Hanish KUMAR, Lin ZHANG, Stanley WU