Patents by Inventor Stanley Zirinsky

Stanley Zirinsky has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for providing a metal silicide layer on a substrate
    Patent number: 4180596
    Abstract: A method for providing on a substrate a layer of a metal silicide such as molybdenum silicide and/or tantalum silicide and/or tungsten silicide and/or rhodium silicide which includes coevaporating silicon and the respective metal onto a substrate, and then heat treating the substrate to form the metal silicide.
    Type: Grant
    Filed: June 30, 1977
    Date of Patent: December 25, 1979
    Assignee: International Business Machines Corporation
    Inventors: Billy L. Crowder, Stanley Zirinsky
  • Process for etching holes
    Patent number: 4106975
    Abstract: A method for etching at least one aperture having a defined crystallographic geometry in single crystals which includes masking the crystal to protect predetermined portions thereof from being etched, and then anisotropically etching with a mixture of sulfuric acid and phosphoric acid.
    Type: Grant
    Filed: June 30, 1977
    Date of Patent: August 15, 1978
    Assignee: International Business Machines Corporation
    Inventors: Melvin Berkenblit, See Ark Chan, Arnold Reisman, Stanley Zirinsky
  • Chemical vapor deposition of dielectric films containing Al, N, and Si
    Patent number: 3974003
    Abstract: Method for depositing a layer containing Al; N, and Si on a substrate which comprises providing a substrate to be coated, a carrier gas, and a gaseous mixture of nitrogen source compounds, aluminum source compounds and silicon source material and heating the substrate to a temperature in the range of about 500.degree. to about 1,300.degree. C to thereby cause formation on the substrate of a layer containing Al, N, and Si; and products obtained by the method.
    Type: Grant
    Filed: August 25, 1975
    Date of Patent: August 10, 1976
    Assignee: IBM
    Inventors: Stanley Zirinsky, Eugene A. Irene, Victor J. Silvestri