Patents by Inventor Stefan Behler

Stefan Behler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210391205
    Abstract: A die-ejector (2) comprising a chamber (4) with a cover plate (40) having a passageway, a plurality of plates (56) arranged inside the chamber (4) and reciprocally movable between an initial position (58) and an operating position (60), respectively, intended to interact with the carrier to support the removal of the dies from the carrier, and a drive member (100) for moving the plates (56) to be moved from the operating position towards the initial position. The die-ejector (2) further comprises a magnet (20) and a spring system, respectively, which interacts with anchor sections (74) of the plates (56) and exerts on the plates (54) an attraction force (F?) or an impact force, respectively, directed towards the operating position, and a stop member (78) for stopping the movement of the plates (56) in the operating position, the plates abutting the stop member (78) in the operating position.
    Type: Application
    Filed: October 15, 2019
    Publication date: December 16, 2021
    Inventors: Fabian Hurschler, Stefan Behler, Brian Pulis
  • Patent number: 8715457
    Abstract: The detachment and removal of a semiconductor chip from a foil occurs in accordance with the invention in three phases. In the first phase there is a partial detachment of the semiconductor chip from the foil with mechanical means, but without the participation of a chip gripper. In the second phase the semiconductor chip is further detached from the foil, with the semiconductor chip being held by the chip gripper. In the third phase the chip gripper is lifted and moved away.
    Type: Grant
    Filed: November 3, 2009
    Date of Patent: May 6, 2014
    Assignee: Esec AG
    Inventor: Stefan Behler
  • Patent number: 8133823
    Abstract: The invention relates to a method for picking up semiconductor chips from a wafer table and, optionally, their mounting on a substrate by means of a pick-and-place system. The position and orientation of the semiconductor chip to be mounted next are determined by means of a first camera and made available in the form of positional data relating to a first system of coordinates. The position and orientation of the substrate place on which the semiconductor chip will be mounted are determined by means of a second camera and made available in the form of positional data relating to a second system of coordinates. The conversion of coordinates of the first or second system of coordinates into coordinates of motion of the pick-and-place system occurs by means of two fixed mapping functions and two changeable correction vectors. The correction vectors are readjusted on the occurrence of a predetermined event.
    Type: Grant
    Filed: October 8, 2008
    Date of Patent: March 13, 2012
    Assignee: Oerlikon Assembly Equipment AG, Steinhausen
    Inventors: Stefan Behler, Patrick Blessing
  • Publication number: 20110214819
    Abstract: The detachment and removal of a semiconductor chip from a foil occurs in accordance with the invention in three phases. In the first phase there is a partial detachment of the semiconductor chip from the foil with mechanical means, but without the participation of a chip gripper. In the second phase the semiconductor chip is further detached from the foil, with the semiconductor chip being held by the chip gripper. In the third phase the chip gripper is lifted and moved away.
    Type: Application
    Filed: November 3, 2009
    Publication date: September 8, 2011
    Applicant: ESEC AG
    Inventor: Stefan Behler
  • Publication number: 20100315655
    Abstract: Determination of the height difference between a first reference point and a second reference point, at least one of the two reference points lying on a semiconductor chip, which is mounted on a substrate, comprises the steps A) recording a first image from a first direction, which runs diagonally to the surface of the substrate at a predetermined angle ?2, the substrate and the semiconductor chip being illuminated from a second direction which runs diagonally to the surface of the substrate at a predetermined angle ?3, a telecentric optics being located in the beam path, B) recording a second image from the second direction, the substrate and the semiconductor chip being illuminated from the first direction, either the cited telecentric optics or a further telecentric optics being located in the beam path, C) ascertaining a first coordinate of the position of the first reference point and a first coordinate of the position of the second reference point in the first image and determining a first difference
    Type: Application
    Filed: November 19, 2007
    Publication date: December 16, 2010
    Applicant: ESEC AG
    Inventors: Stefan Behler, Patrick Blessing, Stephan Scholze, Roland Stalder, Martin Von Arx
  • Publication number: 20090098667
    Abstract: The invention relates to a method for picking up semiconductor chips from a wafer table and, optionally, their mounting on a substrate by means of a pick-and-place system. The position and orientation of the semiconductor chip to be mounted next are determined by means of a first camera and made available in the form of positional data relating to a first system of coordinates. The position and orientation of the substrate place on which the semiconductor chip will be mounted are determined by means of a second camera and made available in the form of positional data relating to a second system of coordinates. The conversion of coordinates of the first or second system of coordinates into coordinates of motion of the pick-and-place system occurs by means of two fixed mapping functions and two changeable correction vectors. The correction vectors are readjusted on the occurrence of a predetermined event.
    Type: Application
    Filed: October 8, 2008
    Publication date: April 16, 2009
    Applicant: Oerlikon Assembly Equipment AG, Steinhausen
    Inventors: Stefan Behler, Patrick Blessing
  • Patent number: 7066373
    Abstract: In order to eliminate the inclination of a semiconductor chip picked by a gripper, the height of at least three points on the underneath of the semiconductor chip is determined in relation to a reference surface and from this the inclination is calculated. Determining the heights takes place in that the semiconductor chip is lowered until the semiconductor chip comes into contact with a needle.
    Type: Grant
    Filed: September 10, 2004
    Date of Patent: June 27, 2006
    Assignee: Unaxis International Trading Ltd
    Inventor: Stefan Behler
  • Publication number: 20050061852
    Abstract: In order to eliminate the inclination of a semiconductor chip picked by a gripper, the height of at least three points on the underneath of the semiconductor chip is determined in relation to a reference surface and from this the inclination is calculated. Determining the heights takes place in that the semiconductor chip is lowered until the semiconductor chip comes into contact with a needle.
    Type: Application
    Filed: September 10, 2004
    Publication date: March 24, 2005
    Inventor: Stefan Behler
  • Patent number: 6585145
    Abstract: A Die Bonder or a Wire Bonder contains a device for holding down a substrate. The device comprises a table with drill holes. The drill holes are mechanically programmable with regard to whether vacuum can be applied to them or not. The mechanical programming enables a fast and easy adaptation of the device to different substrates.
    Type: Grant
    Filed: December 4, 2001
    Date of Patent: July 1, 2003
    Assignee: ESEC Trading SA
    Inventors: Stefan Behler, Beat Zumbuehl, Reto Schubiger, Ruedi Grueter, Rolf Schuermann
  • Patent number: 6435492
    Abstract: A Die Bonder or Wire Bonder has a suction device for pulling flat and holding down a curved substrate equipped with or to be equipped with a semiconductor chip onto a supporting surface of a plate. The plate contains at least one cavity open towards the supporting surface in which there is a vacuum gripper made out of flexible material, whereby the vacuum gripper is lowerable into the cavity during transport of the substrate and which is raisable above the level of the supporting surface to apply suction to the substrate.
    Type: Grant
    Filed: December 8, 2000
    Date of Patent: August 20, 2002
    Assignee: ESEC Trading SA
    Inventors: Stefan Behler, Reto Schubiger, Beat Zumbuehl
  • Publication number: 20020093130
    Abstract: A Die Bonder or Wire Bonder has a suction device for pulling flat and holding down a curved substrate equipped with or to be equipped with a semiconductor chip onto a supporting surface of a plate. The plate contains at least one cavity open towards the supporting surface in which there is a vacuum gripper made out of flexible material, whereby the vacuum gripper is lowerable into the cavity during transport of the substrate and which is raisable above the level of the supporting surface to apply suction to the substrate.
    Type: Application
    Filed: December 8, 2000
    Publication date: July 18, 2002
    Inventors: Stefan Behler, Reto Schubiger, Beat Zumbuehl
  • Publication number: 20020066765
    Abstract: A Die Bonder or a Wire Bonder contains a device for holding down a substrate. The device comprises a table with drill holes. The drill holes are mechanically programmable with regard to whether vacuum can be applied to them or not. The mechanical programming enables a fast and easy adaptation of the device to different substrates.
    Type: Application
    Filed: December 4, 2001
    Publication date: June 6, 2002
    Inventors: Stefan Behler, Beat Zumbuehl, Reto Schubiger, Ruedi Grueter, Rolf Schuermann