Abstract: An actuator-sensor device for an optics module of a lithography apparatus comprises: an actuator-sensor unit having an actuator and a sensor; a control unit electrically connected to the actuator-sensor unit; and a support element which on a first supporting side of same supports the actuator-sensor unit and which on a second supporting side of same supports the control unit, with the second supporting side being opposite to the first supporting side.

Abstract: A control device actuates actuator unit to set a position of an optical element of a lithography system. The control device includes an amplifier unit for providing a control signal for the actuator unit via a voltage signal and a PWM signal. The PWM signal has a duty factor and a clock frequency. The control device also includes a modulator unit designed to provide the PWM signal having the duty factor and a defined clock frequency from a plurality of defined clock frequencies. A defined clock frequency of the plurality of defined clock frequencies is an integer multiple of a basic clock frequency. The basic clock frequency is in the range of 10 kHz to 1 MHz.

Abstract: A component for a projection exposure apparatus includes a printed circuit board arranged in an encapsulated housing and having electronic component parts, and a heat conducting structure for dissipating heat from the electronic component parts to an outer side of the housing.

Abstract: A component for a projection exposure apparatus includes a printed circuit board arranged in an encapsulated housing and having electronic component parts, and a heat conducting structure for dissipating heat from the electronic component parts to an outer side of the housing.

Abstract: A sensor arrangement includes at least one position sensor apparatus for providing a position signal for a mirror and an evaluation apparatus for ascertaining the position of the mirror depending on the position signal.

Abstract: Sensor arrangements, methods for ascertaining a respective position of a number of mirrors of a lithography apparatus, projection systems of a lithography apparatus, and lithography apparatus are disclosed. The sensor arrangement includes at least one position sensor apparatus for providing a position signal for a mirror and an evaluation apparatus for ascertaining the position of the mirror depending on the position signal.

Abstract: A control device actuates actuator unit to set a position of an optical element of a lithography system. The control device includes an amplifier unit for providing a control signal for the actuator unit via a voltage signal and a PWM signal. The PWM signal has a duty factor and a clock frequency. The control device also includes a modulator unit designed to provide the PWM signal having the duty factor and a defined clock frequency from a plurality of defined clock frequencies. A defined clock frequency of the plurality of defined clock frequencies is an integer multiple of a basic clock frequency. The basic clock frequency is in the range of 10 kHz to 1 MHz.

Abstract: An external facility is used to control positioning of multiple displaceable mirror elements of a multi-mirror arrangement. The external facility is to a multi-mirror arrangement via a data channel having a bandwidth of at least 1 kHz per controlled degree of freedom of displacement.

Abstract: A sensor arrangement includes at least one position sensor apparatus for providing a position signal for a mirror and an evaluation apparatus for ascertaining the position of the mirror depending on the position signal.

Abstract: Sensor arrangements, methods for ascertaining a respective position of a number of mirrors of a lithography apparatus, projection systems of a lithography apparatus, and lithography apparatus are disclosed. The sensor arrangement includes at least one position sensor apparatus for providing a position signal for a mirror and an evaluation apparatus for ascertaining the position of the mirror depending on the position signal.

Abstract: A method for displacing an optical component is disclosed, in which the electrical power maximally required when displacing the component is less than the sum of the maximum electrical powers of the at least two actuators used for the displacement.

Abstract: An external facility is used to control positioning of multiple displaceable mirror elements of a multi-mirror arrangement. The external facility is to a multi-mirror arrangement via a data channel having a bandwidth of at least 1 kHz per controlled degree of freedom of displacement.

Abstract: A method for displacing an optical component is disclosed, in which the electrical power maximally required when displacing the component is less than the sum of the maximum electrical powers of the at least two actuators used for the displacement.

Abstract: A radio communication method and a corresponding system are described. Time frequency resources are divided into a grid of resources. For communicating with a plurality of non-synchronized terminals the timing offset of each terminal is measured and a joint message is asynchronously transmitted to a subset of terminals, wherein the subset comprises at least two terminals.

Abstract: A method and corresponding devices for processing and transmitting information are described. A sequence of binary signals is mapped to symbols that forms a two-dimensional matrix of symbols in one of the frequency-time or time-time or time-frequency or frequency-frequency domain and which may be filtered in that domain. Selecting the diagonal elements of said matrix forms a transmit vector.

Abstract: A radio communication system comprises an access station that is adapted and configured to transmit a rateless encoded multicast message to a plurality of radio terminals. Each of the radio terminals transmits a reply message to the access station upon successful reception of the multicast message, wherein the transmit resources are selected from a predefined set of agreed transmit resources, where the selection is influenced by certain characteristics of the reception of the multicast message.

Abstract: A radio communication method and a corresponding system are described. Time frequency resources are divided into a grid of resources. For communicating with a plurality of non-synchronized terminals the timing offset of each terminal is measured and a joint message is asynchronously transmitted to a subset of terminals, wherein the subset comprises at least two terminals.

Abstract: In a method for detecting an offset drift in a resistive Wheatstone measuring bridge, a switch is made between a measuring mode and a testing mode without interfering in the internal structure of the measuring bridge. In testing mode, two sensor resistors that act in the same way and lie in different bridge arms in the measuring mode are connected in series, and a voltage level occurring in the connection of these sensor resistors is compared with a reference voltage. Preferably the sensor resistor that acts in a different way and lies between the two series-connected sensor resistors acting in the same way is bridged. The reference voltage is advantageously formed by resistive division of the voltage applied to the series connection of the sensor resistors. The testing mode may expediently be switched in such a way that the two pairs of sensor resistors acting in the same way are respectively tested in succession.

Abstract: In a method for detecting an offset drift in a resistive Wheatstone measuring bridge, a switch is made between a measuring mode and a testing mode without intervening in the internal structure of the measuring bridge. To this end, in testing mode two sensor resistors which act in the same way and lie in different bridge arms in the measuring mode, are connected in series and a voltage level occurring in the connection of these sensor resistors is compared with a reference voltage. Preferably the sensor resistor which acts in a different way and lies between the two series-connected sensor resistors acting in the same way is bridged. The reference voltage is advantageously formed by resistive division of the voltage applied to the series connection of the sensor resistors. The testing mode may expediently be switched in such a way that the two pairs of sensor resistors respectively acting in the same way are tested in succession.