Patents by Inventor Stefano Rassiga

Stefano Rassiga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ternary tungsten-containing resistive thin films
    Patent number: 8062977
    Abstract: Heater elements made of high resistivity ternary and quaternary thin films containing three or more of W, C, O, N and Si are provided. The thin films have resistivities at least about 1000 ??-cm at 50 to 60 Angstroms. The ternary and quaternary films have improved stability over binary films on anneal. Methods of depositing the thin films are also provided. The methods involve depositing the film from an organometallic tungsten precursor under conditions such that a highly resistive, continuous film is formed.
    Type: Grant
    Filed: January 30, 2009
    Date of Patent: November 22, 2011
    Assignee: Novellus Systems, Inc.
    Inventors: Kaihan Ashtiani, Raashina Humayun, Girish Dixit, Anna Battaglia, Stefano Rassiga