Patents by Inventor Steffen Erhard
Steffen Erhard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11988909Abstract: A Faraday rotator includes: a disk-shaped magneto-optical solid-state medium, a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium, a heat sink with a support surface for the magneto-optical solid-state medium, a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium facing away from the support surface, and a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to a second impingement region at least partly overlapping with the first impingement region on the first side. An optical isolator can have at least one such Faraday rotator. A driver laser arrangement can have at least one such optical isolator. An EUV radiation generation apparatus can have such a driver laser arrangement.Type: GrantFiled: August 18, 2020Date of Patent: May 21, 2024Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbHInventor: Steffen Erhard
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Publication number: 20200379281Abstract: A Faraday rotator includes: a disk-shaped magneto-optical solid-state medium, a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium, a heat sink with a support surface for the magneto-optical solid-state medium, a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium facing away from the support surface, and a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to a second impingement region at least partly overlapping with the first impingement region on the first side. An optical isolator can have at least one such Faraday rotator. A driver laser arrangement can have at least one such optical isolator. An EUV radiation generation apparatus can have such a driver laser arrangement.Type: ApplicationFiled: August 18, 2020Publication date: December 3, 2020Inventor: Steffen Erhard
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Patent number: 6891874Abstract: The invention relates to a laser amplifier system consisting of a solid body, which comprises a laser-active medium, of a pumping radiation source for generating a pumping radiation field, which repeatedly permeates the solid body, and of a focusing system. Said focusing system generates a number of different branches of the pumping radiation field that enter the solid body and converts at least one branch emerging from the solid body into one of the branches which enter the solid body and which are different from the emerging branch. The aim of the invention is to improve a laser amplifier system of the aforementioned type in order to be able to generate the highest possible pumping power density in the solid body while requiring the smallest possible amount of complexity.Type: GrantFiled: July 29, 2002Date of Patent: May 10, 2005Assignee: Universitaet Stuttgart Institut fuer StrahlwerkzeugeInventors: Steffen Erhard, Adolf Giesen, Christian Stewen
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Patent number: 6778580Abstract: The invention relates to a laser amplifier system consisting of a solid body, which comprises a laser-active medium, of an excitation source for producing an excited state of the laser-active medium, and of an amplifier radiation field, which repeatedly permeates the solid body and out of which a laser beam can be decoupled. The aim of the invention is to improve a laser-amplifier system of this type so that the highest number of passages of the amplifier radiation field through the solid body can be attained using optical means that are provided in the most simple possible form. To this end, the invention provides radiation field guiding optics which enable the amplifier radiation field to enter the solid body in the form of a number of incident branches with locally different trajectories, and which enable the amplifier radiation field to exit the solid body in the form of at least one emerging branch with a trajectory that differs locally from those of the incident branches.Type: GrantFiled: July 29, 2002Date of Patent: August 17, 2004Assignee: Universitaet Stuttgart Institut fuer StrahlwerkzeugeInventors: Steffen Erhard, Adolf Giesen
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Patent number: 6577666Abstract: In order to improve a laser amplification system, comprising a solid-state body having a laser-active medium, a pumping radiation source for generating a pumping radiation field which passes through the solid-state body several times, an optical pumping radiation imaging means which is arranged between the pumping radiation source and the solid-state body and focuses a leg of the pumping radiation field entering the solid-state body onto the solid-state body and at least one optical refocusing means which focuses a leg of the pumping radiation field exiting from the solid-state body onto the solid-state body again in the form of a leg entering the solid-state body and different to the outgoing leg, in such a manner that as high a pumping radiation power density as possible can be generated in the solid-state body with as little resources as possible it is suggested that the optical refocusing means reshape the leg exiting from the solid-state body into an intermediately collimated leg and reshape the intermedType: GrantFiled: February 2, 2001Date of Patent: June 10, 2003Assignee: Universitaet Stuttgart Institut fuer StrahlwerkzeugeInventors: Steffen Erhard, Adolf Giesen, Martin Karszewski, Christian Stewen, Andreas Voss
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Publication number: 20030025987Abstract: The invention relates to a laser amplifier system consisting of a solid body, which comprises a laser-active medium, of a pumping radiation source for generating a pumping radiation field, which repeatedly permeates the solid body, and of a focusing system. Said focusing system generates a number of different branches of the pumping radiation field that enter the solid body and converts at least one branch emerging from the solid body into one of the branches which enter the solid body and which are different from the emerging branch. The aim of the invention is to improve a laser amplifier system of the aforementioned type in order to be able to generate the highest possible pumping power density in the solid body while requiring the smallest possible amount of complexity.Type: ApplicationFiled: July 29, 2002Publication date: February 6, 2003Applicant: Universitaet Stuttgart Institut fuer StrahlwerkzeugeInventors: Steffen Erhard, Adolf Giesen, Christian Stewen
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Publication number: 20030026315Abstract: The invention relates to a laser amplifier system consisting of a solid body, which comprises a laser-active medium, of an excitation source for producing an excited state of the laser-active medium, and of an amplifier radiation field, which repeatedly permeates the solid body and out of which a laser beam can be decoupled. The aim of the invention is to improve a laser-amplifier system of this type so that the highest number of passages of the amplifier radiation field through the solid body can be attained using optical means that are provided in the most simple possible form. To this end, the invention provides radiation field guiding optics which enable the amplifier radiation field to enter the solid body in the form of a number of incident branches with locally different trajectories, and which enable the amplifier radiation field to exit the solid body in the form of at least one emerging branch with a trajectory that differs locally from those of the incident branches.Type: ApplicationFiled: July 29, 2002Publication date: February 6, 2003Applicant: Universitaet Stuttgart Institut fuer StrahlwerkzeugeInventors: Steffen Erhard, Adolf Giesen
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Patent number: 6438152Abstract: In order to provide a laser amplification system comprising several solid-state volumes having a laser-active medium, a pumping radiation source, a pumping radiation reflector which allows a leg of the pumping radiation field entering the solid-state volume to pass through the solid-state volume again as outgoing leg such that the incoming leg and the outgoing leg form a first pumping branch, a first pumping radiation path, in which the pumping radiation field passes through the first pumping branches in a first sequence, with which the individual solid-state volumes are acted upon with pumping power as uniformly as possible, it is suggested that each solid-state volume be penetrated by a second pumping branch, the incoming leg of which and the outgoing leg of which are located in a second plane different to the first plane, that a second pumping radiation path be provided, in which the pumping radiation field passes through the second pumping branches in a second sequence and that in the second sequence theType: GrantFiled: February 2, 2001Date of Patent: August 20, 2002Assignee: Universitaet Stuttgart Institut fuer StrahlwerkzeugeInventors: Karsten Contag, Steffen Erhard, Adolf Giesen, Martin Karszewski, Christian Stewen, Andreas Voss
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Publication number: 20010040909Abstract: In order to improve a laser amplification system, comprising a solid-state body having a laser-active medium, a pumping radiation source for generating a pumping radiation field which passes through the solid-state body several times, an optical pumping radiation imaging means which is arranged between the pumping radiation source and the solid-state body and focuses a leg of the pumping radiation field entering the solid-state body onto the solid-state body and at least one optical refocusing means which focuses a leg of the pumping radiation field exiting from the solid-state body onto the solid-state body again in the form of a leg entering the solid-state body and different to the outgoing leg, in such a manner that as high a pumping radiation power density as possible can be generated in the solid-state body with as little resources as possible it is suggested that the optical refocusing means reshape the leg exiting from the solid-state body into an intermediately collimated leg and reshape the intermedType: ApplicationFiled: February 2, 2001Publication date: November 15, 2001Inventors: Steffen Erhard, Adolf Giesen, Martin Karszewski, Christian Stewen, Andreas Voss
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Publication number: 20010038658Abstract: In order to provide a laser amplification system comprising several solid-state volumes having a laser-active medium, a pumping radiation source, a pumping radiation reflector which allows a leg of the pumping radiation field entering the solid-state volume to pass through the solid-state volume again as outgoing leg such that the incoming leg and the outgoing leg form a first pumping branch, a first pumping radiation path, in which the pumping radiation field passes through the first pumping branches in a first sequence, with which the individual solid-state volumes are acted upon with pumping power as uniformly as possible, it is suggested that each solid-state volume be penetrated by a second pumping branch, the incoming leg of which and the outgoing leg of which are located in a second plane different to the first plane, that a second pumping radiation path be provided, in which the pumping radiation field passes through the second pumping branches in a second sequence and that in the second sequence theType: ApplicationFiled: February 2, 2001Publication date: November 8, 2001Applicant: Universitaet Stuttgart Institut fuer StrahlwerkzuegeInventors: Karsten Contag, Steffen Erhard, Adolf Giesen, Martin Karszewski, Christian Stewen, Andreas Voss