Patents by Inventor Steffen Erhard

Steffen Erhard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11988909
    Abstract: A Faraday rotator includes: a disk-shaped magneto-optical solid-state medium, a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium, a heat sink with a support surface for the magneto-optical solid-state medium, a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium facing away from the support surface, and a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to a second impingement region at least partly overlapping with the first impingement region on the first side. An optical isolator can have at least one such Faraday rotator. A driver laser arrangement can have at least one such optical isolator. An EUV radiation generation apparatus can have such a driver laser arrangement.
    Type: Grant
    Filed: August 18, 2020
    Date of Patent: May 21, 2024
    Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    Inventor: Steffen Erhard
  • Publication number: 20200379281
    Abstract: A Faraday rotator includes: a disk-shaped magneto-optical solid-state medium, a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium, a heat sink with a support surface for the magneto-optical solid-state medium, a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium facing away from the support surface, and a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to a second impingement region at least partly overlapping with the first impingement region on the first side. An optical isolator can have at least one such Faraday rotator. A driver laser arrangement can have at least one such optical isolator. An EUV radiation generation apparatus can have such a driver laser arrangement.
    Type: Application
    Filed: August 18, 2020
    Publication date: December 3, 2020
    Inventor: Steffen Erhard
  • Patent number: 6891874
    Abstract: The invention relates to a laser amplifier system consisting of a solid body, which comprises a laser-active medium, of a pumping radiation source for generating a pumping radiation field, which repeatedly permeates the solid body, and of a focusing system. Said focusing system generates a number of different branches of the pumping radiation field that enter the solid body and converts at least one branch emerging from the solid body into one of the branches which enter the solid body and which are different from the emerging branch. The aim of the invention is to improve a laser amplifier system of the aforementioned type in order to be able to generate the highest possible pumping power density in the solid body while requiring the smallest possible amount of complexity.
    Type: Grant
    Filed: July 29, 2002
    Date of Patent: May 10, 2005
    Assignee: Universitaet Stuttgart Institut fuer Strahlwerkzeuge
    Inventors: Steffen Erhard, Adolf Giesen, Christian Stewen
  • Patent number: 6778580
    Abstract: The invention relates to a laser amplifier system consisting of a solid body, which comprises a laser-active medium, of an excitation source for producing an excited state of the laser-active medium, and of an amplifier radiation field, which repeatedly permeates the solid body and out of which a laser beam can be decoupled. The aim of the invention is to improve a laser-amplifier system of this type so that the highest number of passages of the amplifier radiation field through the solid body can be attained using optical means that are provided in the most simple possible form. To this end, the invention provides radiation field guiding optics which enable the amplifier radiation field to enter the solid body in the form of a number of incident branches with locally different trajectories, and which enable the amplifier radiation field to exit the solid body in the form of at least one emerging branch with a trajectory that differs locally from those of the incident branches.
    Type: Grant
    Filed: July 29, 2002
    Date of Patent: August 17, 2004
    Assignee: Universitaet Stuttgart Institut fuer Strahlwerkzeuge
    Inventors: Steffen Erhard, Adolf Giesen
  • Patent number: 6577666
    Abstract: In order to improve a laser amplification system, comprising a solid-state body having a laser-active medium, a pumping radiation source for generating a pumping radiation field which passes through the solid-state body several times, an optical pumping radiation imaging means which is arranged between the pumping radiation source and the solid-state body and focuses a leg of the pumping radiation field entering the solid-state body onto the solid-state body and at least one optical refocusing means which focuses a leg of the pumping radiation field exiting from the solid-state body onto the solid-state body again in the form of a leg entering the solid-state body and different to the outgoing leg, in such a manner that as high a pumping radiation power density as possible can be generated in the solid-state body with as little resources as possible it is suggested that the optical refocusing means reshape the leg exiting from the solid-state body into an intermediately collimated leg and reshape the intermed
    Type: Grant
    Filed: February 2, 2001
    Date of Patent: June 10, 2003
    Assignee: Universitaet Stuttgart Institut fuer Strahlwerkzeuge
    Inventors: Steffen Erhard, Adolf Giesen, Martin Karszewski, Christian Stewen, Andreas Voss
  • Publication number: 20030025987
    Abstract: The invention relates to a laser amplifier system consisting of a solid body, which comprises a laser-active medium, of a pumping radiation source for generating a pumping radiation field, which repeatedly permeates the solid body, and of a focusing system. Said focusing system generates a number of different branches of the pumping radiation field that enter the solid body and converts at least one branch emerging from the solid body into one of the branches which enter the solid body and which are different from the emerging branch. The aim of the invention is to improve a laser amplifier system of the aforementioned type in order to be able to generate the highest possible pumping power density in the solid body while requiring the smallest possible amount of complexity.
    Type: Application
    Filed: July 29, 2002
    Publication date: February 6, 2003
    Applicant: Universitaet Stuttgart Institut fuer Strahlwerkzeuge
    Inventors: Steffen Erhard, Adolf Giesen, Christian Stewen
  • Publication number: 20030026315
    Abstract: The invention relates to a laser amplifier system consisting of a solid body, which comprises a laser-active medium, of an excitation source for producing an excited state of the laser-active medium, and of an amplifier radiation field, which repeatedly permeates the solid body and out of which a laser beam can be decoupled. The aim of the invention is to improve a laser-amplifier system of this type so that the highest number of passages of the amplifier radiation field through the solid body can be attained using optical means that are provided in the most simple possible form. To this end, the invention provides radiation field guiding optics which enable the amplifier radiation field to enter the solid body in the form of a number of incident branches with locally different trajectories, and which enable the amplifier radiation field to exit the solid body in the form of at least one emerging branch with a trajectory that differs locally from those of the incident branches.
    Type: Application
    Filed: July 29, 2002
    Publication date: February 6, 2003
    Applicant: Universitaet Stuttgart Institut fuer Strahlwerkzeuge
    Inventors: Steffen Erhard, Adolf Giesen
  • Patent number: 6438152
    Abstract: In order to provide a laser amplification system comprising several solid-state volumes having a laser-active medium, a pumping radiation source, a pumping radiation reflector which allows a leg of the pumping radiation field entering the solid-state volume to pass through the solid-state volume again as outgoing leg such that the incoming leg and the outgoing leg form a first pumping branch, a first pumping radiation path, in which the pumping radiation field passes through the first pumping branches in a first sequence, with which the individual solid-state volumes are acted upon with pumping power as uniformly as possible, it is suggested that each solid-state volume be penetrated by a second pumping branch, the incoming leg of which and the outgoing leg of which are located in a second plane different to the first plane, that a second pumping radiation path be provided, in which the pumping radiation field passes through the second pumping branches in a second sequence and that in the second sequence the
    Type: Grant
    Filed: February 2, 2001
    Date of Patent: August 20, 2002
    Assignee: Universitaet Stuttgart Institut fuer Strahlwerkzeuge
    Inventors: Karsten Contag, Steffen Erhard, Adolf Giesen, Martin Karszewski, Christian Stewen, Andreas Voss
  • Publication number: 20010040909
    Abstract: In order to improve a laser amplification system, comprising a solid-state body having a laser-active medium, a pumping radiation source for generating a pumping radiation field which passes through the solid-state body several times, an optical pumping radiation imaging means which is arranged between the pumping radiation source and the solid-state body and focuses a leg of the pumping radiation field entering the solid-state body onto the solid-state body and at least one optical refocusing means which focuses a leg of the pumping radiation field exiting from the solid-state body onto the solid-state body again in the form of a leg entering the solid-state body and different to the outgoing leg, in such a manner that as high a pumping radiation power density as possible can be generated in the solid-state body with as little resources as possible it is suggested that the optical refocusing means reshape the leg exiting from the solid-state body into an intermediately collimated leg and reshape the intermed
    Type: Application
    Filed: February 2, 2001
    Publication date: November 15, 2001
    Inventors: Steffen Erhard, Adolf Giesen, Martin Karszewski, Christian Stewen, Andreas Voss
  • Publication number: 20010038658
    Abstract: In order to provide a laser amplification system comprising several solid-state volumes having a laser-active medium, a pumping radiation source, a pumping radiation reflector which allows a leg of the pumping radiation field entering the solid-state volume to pass through the solid-state volume again as outgoing leg such that the incoming leg and the outgoing leg form a first pumping branch, a first pumping radiation path, in which the pumping radiation field passes through the first pumping branches in a first sequence, with which the individual solid-state volumes are acted upon with pumping power as uniformly as possible, it is suggested that each solid-state volume be penetrated by a second pumping branch, the incoming leg of which and the outgoing leg of which are located in a second plane different to the first plane, that a second pumping radiation path be provided, in which the pumping radiation field passes through the second pumping branches in a second sequence and that in the second sequence the
    Type: Application
    Filed: February 2, 2001
    Publication date: November 8, 2001
    Applicant: Universitaet Stuttgart Institut fuer Strahlwerkzuege
    Inventors: Karsten Contag, Steffen Erhard, Adolf Giesen, Martin Karszewski, Christian Stewen, Andreas Voss