Abstract: A mobile transportable electrostatic substrate holder is provided that has a diameter or edge length matching the diameter or edge length of a substrate to be transported. The tolerance of the matching dimensions, locally, at certain locations, or everywhere, is less than 0.1 mm. In another embodiment, the substrate holder has a diameter or edge length smaller by 0.1 mm to 30 mm, locally, at certain locations, or everywhere, than the diameter or edge length of the substrate to be transported. In a third embodiment, the substrate holder has a diameter or edge length that is greater by 0.1 mm up to 150 mm, locally, at certain locations, or everywhere, than the diameter or edge length of the substrate to be transported.

Abstract: A mobile transportable electrostatic substrate holder is provided that has a diameter or edge length matching the diameter or edge length of a substrate to be transported. The tolerance of the matching dimensions, locally, at certain locations, or everywhere, is less than 0.1 mm. In another embodiment, the substrate holder has a diameter or edge length smaller by 0.1 mm to 30 mm, locally, at certain locations, or everywhere, than the diameter or edge length of the substrate to be transported. In a third embodiment, the substrate holder has a diameter or edge length that is greater by 0.1 mm up to 150 mm, locally, at certain locations, or everywhere, than the diameter or edge length of the substrate to be transported.