Abstract: A device for positioning disk-shaped objects (1) to inspect the front and rear sides of disk-shaped objects and to reduce the negative effect of large-area contact between the holder and the disk-shaped object. The device comprises a rotatable table (24) which can be adjusted in the x-y direction in an adjustment plane and is intended to accomodate a platform (3). A fork-shaped frame (8) is mounted on the platform so as to be rotatable about an axis of rotation which is aligned perpendicular to the surface of the platform (3) and the angle of tilt of which can be set relative to the adjustment plane. At its fork ends, the fork-shaped frame (8) has another axis of rotation which is aligned perpendicular to the axis of rotation of the fork-shaped frame (8) and about which a frame-shaped object holder (9) is mounted so as to be rotatable in the fork-shaped frame (8) for the purpose of turning the object.

Abstract: The invention relates to an apparatus for transporting and aligning disk-shaped elements in particular wafers which have to be removed from the processing devices and transported to further processing devices and inserted therein during the manufacturing process as a result of technologic unemployment, and which have to be removed again after processing. Such an apparatus should be simply and solidly built, and which can be produced at a reasonable price and which is versatile. On the apparatus a carriage is arranged on a rotatable carriage support. The carriage support can be laterally moved. In addition, a holder for a disk-shaped element is guided for alignment with the rotation axis of the carriage support and through the latter. The carriage and/or carriage support and the holder as well are movable relative to each other in the vertical direction, and at least one detector for determining the location of markers existing on a disk-shaped element is arranged on the carriage support.

Abstract: A device for positioning disk-shaped objects (1) to inspect the front and rear sides of disk-shaped objects and to reduce the negative effect of large-area contact between the holder and the disk-shaped object. The device comprises a rotatable table (24) which can be adjusted in the x-y direction in an adjustment plane and is intended to accomodate a platform (3). A fork-shaped frame (8) is mounted on the platform so as to be rotatable about an axis of rotation which is aligned perpendicular to the surface of the platform (3) and the angle of tilt of which can be set relative to the adjustment plane. At its fork ends, the fork-shaped frame (8) has another axis of rotation which is aligned perpendicular to the axis of rotation of the fork-shaped frame (8) and about which a frame-shaped object holder (9) is mounted so as to be rotatable in the fork-shaped frame (8) for the purpose of turning the object.