Patents by Inventor Stephan Schoemann

Stephan Schoemann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method of forming silicide in a localized manner
    Patent number: 7439168
    Abstract: Localized trenches or access holes are milled in a semiconductor substrate to define access points to structures of an integrated circuit intended for circuit editing. A conductor is deposited, such as with a focused ion beam tool, in the access holes and a localized heat is applied to the conductor for silicide formation, especially at the boundary between a semiconductor structure, such as diffusion regions, and the deposited conductor. Localized heat may be generated at the target location through precise laser application, current generation through the target location, or a combination thereof.
    Type: Grant
    Filed: October 12, 2004
    Date of Patent: October 21, 2008
    Assignee: DCG Systems, Inc
    Inventors: Christian Boit, Theodore R. Lundquist, Chun-Cheng Tsao, Uwe Jürgen Kerst, Stephan Schoemann, Peter Sadewater
  • Apparatus and method of forming silicide in a localized manner
    Publication number: 20060079086
    Abstract: Localized trenches or access holes are milled in a semiconductor substrate to define access points to structures of an integrated circuit intended for circuit editing. A conductor is deposited, such as with a focused ion beam tool, in the access holes and a localized heat is applied to the conductor for silicide formation, especially at the boundary between a semiconductor structure, such as diffusion regions, and the deposited conductor. Localized heat may be generated at the target location through precise laser application, current generation through the target location, or a combination thereof.
    Type: Application
    Filed: October 12, 2004
    Publication date: April 13, 2006
    Applicant: Credence Systems Corporation
    Inventors: Christian Boit, Theodore Lundquist, Chun-Cheng Tsao, Uwe Kerst, Stephan Schoemann, Peter Sadewater