Patents by Inventor Stephen Abney

Stephen Abney has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Flow-formed chamber component having a textured surface
    Patent number: 7762114
    Abstract: A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.
    Type: Grant
    Filed: September 9, 2005
    Date of Patent: July 27, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Stephen Abney, Anthony Vesci, Joseph F. Sommers, Marc O'Donnell Schweitzer, Scott Dickerson, Jennifer Watia Tiller
  • Flow-formed chamber component having a textured surface
    Publication number: 20070059460
    Abstract: A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.
    Type: Application
    Filed: September 9, 2005
    Publication date: March 15, 2007
    Inventors: Stephen Abney, Anthony Vesci, Joseph Sommers, Marc Schweitzer, Scott Dickerson, Jennifer Tiller