Patents by Inventor Stephen Gerard Fugardi

Stephen Gerard Fugardi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating a titanium resistor
    Patent number: 5899724
    Abstract: According to the preferred embodiment of the present invention, an improved resistor and method of fabrication is provided. The method for fabricating a resistive element into an integrated circuit semiconductor device comprises the steps of: depositing a dielectric film, such as silicon nitride; depositing a titanium film upon the dielectric film; and annealing the titanium and dielectric films. This causes titanium to be diffused into the dielectric film. This creates a resistive element having a relatively high resistivity. The preferred embodiment method has the advantage of being easily integrated into conventional integrated circuit fabrication techniques.
    Type: Grant
    Filed: May 9, 1996
    Date of Patent: May 4, 1999
    Assignees: International Business Machines Corporation, Siemens Aktiengesellschaft
    Inventors: David Mark Dobuzinsky, Stephen Gerard Fugardi, Erwin Hammerl, Herbert Lei Ho, Samuel C. Ramac, Alvin Wayne Strong