Abstract: Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.

Abstract: The systems and methods discussed herein are associated with substrate support pedestals used in processing chambers to manufacture semiconductors, electronics, optics, and other devices. The substrate support pedestals include an electrostatic chuck body bonded to a cooling base via a bond layer. A gas flow passage is formed between a top surface of the electrostatic chuck body and a bottom surface of the cooling base, and a porous plug is positioned in the gas flow passage. The gas flow passage passes through a hole in the bond layer and the porous plug and has a swept volume physically shielded from an inside edge of the hole in the bond layer, protecting the bond layer from erosion.

Abstract: The systems and methods discussed herein are associated with substrate support pedestals used in processing chambers to manufacture semiconductors, electronics, optics, and other devices. The substrate support pedestals include an electrostatic chuck body bonded to a cooling base via a bond layer. A gas flow passage is formed between a top surface of the electrostatic chuck body and a bottom surface of the cooling base, and a porous plug is positioned in the gas flow passage. The gas flow passage passes through a hole in the bond layer and the porous plug and has a swept volume physically shielded from an inside edge of the hole in the bond layer, protecting the bond layer from erosion.

Abstract: Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.

Abstract: Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.

Abstract: A filtration system for a soil analysis device and methods of pressure filtration and automated cleaning are disclosed for generating filtrate used in measuring characteristics of a soil sample and preparing the filtration system for repeated measurements. A mixing chamber combines a soil sample and an extractant into a liquid mixture. The filtration system receives and pressure filters the liquid mixture to quickly generate filtrate used to measure characteristics of the sample. The filtrate is passed to a measurement cell for analysis. Once the analysis is complete, the filtration system performs a cleaning process in preparation to receive a subsequent liquid mixture from another soil sample.

Abstract: Implementations described herein provide a cooling base and a substrate support assembly having the same. In one example, a cooling base is provided that includes a body coupled to a cap. A plurality cooling channels are disposed in the body and bounded on at least one side by the cap. The plurality cooling channels have a polar array of spirals.

Abstract: The systems and methods discussed herein are associated with substrate support pedestals used in processing chambers to manufacture semiconductors, electronics, optics, and other devices. The substrate support pedestals include an electrostatic chuck body bonded to a cooling base via a bond layer. A gas flow passage is formed between a top surface of the electrostatic chuck body and a bottom surface of the cooling base, and a porous plug is positioned in the gas flow passage. The gas flow passage passes through a hole in the bond layer and the porous plug and has a swept volume physically shielded from an inside edge of the hole in the bond layer, protecting the bond layer from erosion.

Abstract: Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.

Abstract: Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.

Abstract: Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.

Abstract: A filtration system for a soil analysis device and methods of pressure filtration and automated cleaning are disclosed for generating filtrate used in measuring characteristics of a soil sample and preparing the filtration system for repeated measurements. A mixing chamber combines a soil sample and an extractant into a liquid mixture. The filtration system receives and pressure filters the liquid mixture to quickly generate filtrate used to measure characteristics of the sample. The filtrate is passed to a measurement cell for analysis. Once the analysis is complete, the filtration system performs a cleaning process in preparation to receive a subsequent liquid mixture from another soil sample.

Abstract: Precision screen printing is described that is capable of sub-micron uniformity of the metallization materials that are printed on green sheet ceramic. In some examples, puck is formed with electrical traces by screen printing a paste that contains metal on a ceramic green sheet in a pattern of electrical traces and processing the printed green sheet to form a puck of a workpiece carrier. In some example, the printing includes applying a squeegee of a screen printer to the printed green sheet in a squeegeeing direction while the green sheet is on a printer bed of the screen printer. The method further includes mapping the printer bed at multiple locations along the squeegeeing direction, identifying non-uniformities in the printer bed mapping, and modifying a printer controller of the screen printer to compensate for mapped non-uniformities in the printer bed.

Abstract: A filtration system for a soil analysis device and methods of pressure filtration and automated cleaning are disclosed for generating filtrate used in measuring characteristics of a soil sample and preparing the filtration system for repeated measurements. A mixing chamber combines a soil sample and an extractant into a liquid mixture. The filtration system receives and pressure filters the liquid mixture to quickly generate filtrate used to measure characteristics of the sample. The filtrate is passed to a measurement cell for analysis. Once the analysis is complete, the filtration system performs a cleaning process in preparation to receive a subsequent liquid mixture from another soil sample.

Abstract: Implementations described herein provide a cooling base and a substrate support assembly having the same. In one example, a cooling base is provided that includes a body coupled to a cap. A plurality cooling channels are disposed in the body and bounded on at least one side by the cap. The plurality cooling channels have a polar array of spirals.

Abstract: A filtration system for a soil analysis device and methods of pressure filtration and automated cleaning are disclosed for generating filtrate used in measuring characteristics of a soil sample and preparing the filtration system for repeated measurements. A mixing chamber combines a soil sample and an extractant into a liquid mixture. The filtration system receives and pressure filters the liquid mixture to quickly generate filtrate used to measure characteristics of the sample. The filtrate is passed to a measurement cell for analysis. Once the analysis is complete, the filtration system performs a cleaning process in preparation to receive a subsequent liquid mixture from another soil sample.

Abstract: A filtration system for a soil analysis device and methods of pressure filtration and automated cleaning are disclosed for generating filtrate used in measuring characteristics of a soil sample and preparing the filtration system for repeated measurements. A mixing chamber combines a soil sample and an extractant into a liquid mixture. The filtration system receives and pressure filters the liquid mixture to quickly generate filtrate used to measure characteristics of the sample. The filtrate is passed to a measurement cell for analysis. Once the analysis is complete, the filtration system performs a cleaning process in preparation to receive a subsequent liquid mixture from another soil sample.

Abstract: Disclosed are compounds, compositions and methods for treating diseases, syndromes, conditions and disorders that are affected by the inhibition of MGL, including pain. Such compounds are represented by Formula (I) as follows: wherein Y, r, R2 and Z are defined herein.

Abstract: Disclosed are compounds, compositions and methods for treating diseases, syndromes, conditions and disorders that are affected by the inhibition of MGL, including pain. Such compounds are represented by Formula (I) as follows: wherein R1, W and are defined herein.

Abstract: Disclosed are compounds, compositions and methods for treating diseases, syndromes, conditions and disorders that are affected by the inhibition of MGL, including pain. Such compounds are represented by Formula (I) as follows: wherein R1, W and are defined herein.