Abstract: A method of reducing non-uniformity in the resonance frequencies of a surface acoustic wave (SAW) device, the SAW device comprising a silicon oxide layer comprising an oxide of silicon deposited over interdigital transducers on a piezoelectric substrate by reactive sputtering. The method comprises positioning a piezoelectric substrate having interdigital transducers on a substrate support, then depositing a silicon oxide layer comprising an oxide of silicon over the piezoelectric substrate and the interdigital transducers to form a SAW device. The substrate support is positioned relative to a sputtering target so that the silicon oxide layer of the SAW device has an arithmetic mean surface roughness (Ra) of 11 angstroms or less.

Abstract: A method and apparatus are for controlling stress variation in a material layer formed via pulsed DC physical vapour deposition. The method includes the steps of providing a chamber having a target from which the material layer is formed and a substrate upon which the material layer is formable, and subsequently introducing a gas within the chamber. The method further includes generating a plasma within the chamber and applying a first magnetic field proximate the target to substantially localise the plasma adjacent the target. An RF bias is applied to the substrate to attract gas ions from the plasma toward the substrate and a second magnetic field is applied proximate the substrate to steer gas ions from the plasma to selective regions upon the material layer formed on the substrate.

Abstract: A DC magnetron sputtering apparatus is for depositing a film on a substrate. The apparatus includes a chamber, a substrate support positioned within the chamber, a DC magnetron, and an electrical signal supply device for supplying an electrical bias signal that, in use, causes ions to bombard a substrate positioned on the substrate support. The substrate support includes a central region surrounded by an edge region, the central region being raised with respect to the edge region.

Abstract: A through-accessible reversible operation jet pump for attachment to a tubing string includes a pump housing having a pump housing interior and a jet pump assembly retrievably disposed in the pump housing interior. The jet pump assembly includes a carrier, a carrier nozzle in the carrier and at least one carrier opening in the carrier and establishing communication between the carrier nozzle and the pump housing interior. The jet pump assembly is adapted to be selectively removed from the pump housing interior through the tubing string as the pump housing remains attached to the tubing string. The carrier or the jet pump assembly is selectively positional in a first orientation in the pump housing interior to facilitate operation of the jet pump in a first fluid flow direction operational mode.

Abstract: The invention relates to a method of pre-cleaning a semiconductor structure and to associated modular semiconductor process tools. The method includes the steps of: (i) providing a semiconductor structure having an exposed dielectric layer of an organic dielectric material, wherein the dielectric layer has one or more features formed therein which expose one or more electrically conductive structures to be pre-cleaned, in which the electrically conductive structures each include a metal layer, optionally with a barrier layer formed thereon, and the surface area of the exposed dielectric layer is greater than the surface area of the electrically conductive structures exposed by the dielectric layer; and (ii) pre-cleaning the semiconductor structure by performing an Ar/H2 sputter etch to remove material from the exposed electrically conductive structures and to remove organic dielectric material from the exposed dielectric layer.

Abstract: A through-accessible reversible operation jet pump for attachment to a tubing string includes a pump housing having a pump housing interior and a jet pump assembly retrievably disposed in the pump housing interior. The jet pump assembly includes a carrier, a carrier nozzle in the carrier and at least one carrier opening in the carrier and establishing communication between the carrier nozzle and the pump housing interior. The jet pump assembly is adapted to be selectively removed from the pump housing interior through the tubing string as the pump housing remains attached to the tubing string. The carrier of the jet pump assembly is selectively positional in a first orientation in the pump housing interior to facilitate operation of the jet pump in a first fluid flow direction operational mode.

Abstract: A mini blind apparatus is disclosed. The apparatus includes a first slat having a first and a second end and a front and a rear edge. A second slat is disposed spaced and parallel relative to the the first slat, the second slat having a first and a second extremity and a front and a rear side. A control mechanism is connected to the slats for controlling movement of the slats. The spaced disposition of the slats is selectively controlled by the control mechanism. The control mechanism includes a supporting polyester tape connected to the slats.

Abstract: A control apparatus is disclosed for controlling tilting of a plurality of horizontally disposed mini-blind slats. The apparatus includes a support frame for supporting the plurality of slats such that the slats are disposed spaced and parallel relative to each other. A tilting mechanism is pivotally secured to the frame about a pivotal axis which extends spaced and parallel relative to the slats. A first anchor is secured to the tilting mechanism and a second anchor is secured to the tilting mechanism such that the pivotal axis of the tilting mechanism is disposed between the first and second anchors. A first control has a first and a second end, the first end of the first control being secured to the first anchor. A second control has a first and a second extremity, the first extremity of the second control being secured to the second anchor.

Abstract: A mini blind apparatus is disclosed. The apparatus includes a first slat having a first and a second end and a front and a rear edge. A second slat is disposed spaced and parallel relative to the the first slat, the second slat having a first and a second extremity and a front and a rear side. A control mechanism is connected to the slats for controlling movement of the slats. The spaced disposition of the slats is selectively controlled by the control mechanism. The control mechanism includes a supporting polyester tape connected to the slats.