Abstract: A method and apparatus having a RF return path with low impedance coupling a substrate support to a chamber wall in a plasma processing system is provided. In one embodiment, a processing chamber includes a chamber body having a chamber sidewall, a bottom and a lid assembly supported by the chamber sidewall defining a processing region, a substrate support disposed in the processing region of the chamber body, a shadow frame disposed on an edge of the substrate support assembly, and a RF return path having a first end coupled to the shadow frame and a second end coupled to the chamber sidewall.

Abstract: An electrical non-priming submersible pump including a motor assembly that has a motor coupled to a shaft. The shaft has impellers formed thereon for propelling water. Also included is a housing assembly that surrounds the motor assembly. The housing assembly has an intake area that includes a multilayer sediment protection system that prevents the introduction of debris into the housing. The multi-layer sediments protection system includes a first plurality of slots positioned around the circumference of the housing assembly and a screen position in juxtaposition in relation to the first plurality of slots. A sprinkling system is also disclosed including an electrical non-priming submersible pump that is connected to a control panel which is connected to a header pipe section. The header pipe section is connected to a zone pipe section that includes sprinkler heads for applying water to a desired location.

Abstract: An electrical non-priming submersible pump including a motor assembly that has a motor coupled to a shaft. The shaft has impellers formed thereon for propelling water. Also included is a housing assembly that surrounds the motor assembly. The housing assembly has an intake area that includes a multilayer sediment protection system that prevents the introduction of debris into the housing. The multi-layer sediments protection system includes a first plurality of slots positioned around the circumference of the housing assembly and a screen position in juxtaposition in relation to the first plurality of slots.