Abstract: A method of forming a high wear resistance coating on a substrate having a low coefficient of thermal expansion is described. The method may include providing the low CTE substrate, where a surface of the substrate includes a plurality of protrusions raised above the surface. A high wear resistance layer is formed on a top portion of protrusions, where the layer is not contiguous between adjacent protrusions on the substrate. Also, a wafer support component to support a wafer during, for example, a photolithography or inspection process. The wafer support component includes a substrate that has a material with a low coefficient of thermal expansion, where the substrate has a surface with a plurality of protrusions raised about the surface. A high wear resistance layer is formed on a top surface of each of the protrusions.

Abstract: The weight of liquid in a tank subject to tilting is determined by measuring differences in air pressure in the ullage (the empty volume of the tank above the level of the liquid) and the air pressure produced by the weight of the liquid at the bottom of the tank. The pressures at the bottom of the tank are measured in a plurality of locations, and the differential pressures are combined to compensate for changes in the depth of the liquid when the tank is not level (e.g., when the tank is in an aircraft flying at an attitude other than straight and level). The electronics to measure the pressure and to process the pressure measurements are located remotely form the tanks, thus eliminating the possibility of ignition caused by the electronics when the liquid is fuel or other flammable liquid.