Abstract: A method for etching an organic carbon based layer below a silicon containing hardmask is provided. An etch gas is provided comprising oxygen and a halogen containing component, and a passivation component, wherein a ratio by volume of total flow rate of the etch gas to flow rate of the halogen containing component is between 10,000:1 to 10:1. The etch gas is formed into a plasma, wherein the organic carbon based layer and the silicon contain hardmask are exposed to the plasma and wherein the plasma selectively etches the organic carbon based layer with respect to the silicon containing hardmask.

Abstract: A method for etching an organic carbon based layer below a silicon containing hardmask is provided. An etch gas is provided comprising oxygen and a halogen containing component, and a passivation component, wherein a ratio by volume of total flow rate of the etch gas to flow rate of the halogen containing component is between 10,000:1 to 10:1. The etch gas is formed into a plasma, wherein the organic carbon based layer and the silicon contain hardmask are exposed to the plasma and wherein the plasma selectively etches the organic carbon based layer with respect to the silicon containing hardmask.

Abstract: The present invention generally relates to a process for the formation of a CO2-selective absorption material and/or sulfur-selective absorption material. In one embodiment, the present invention relates to a process for the formation of a CO2-selective absorption material that comprises providing a solid material, providing an amine source, contacting the solid material with the amine source to absorb amine molecules on the surface of the solid material, and contacting the absorbing amine molecules on the solid material surface with a CO2 stream such that upon contact with the amine and the solid material, CO2 binds with the amine functional group of the amine molecule, reducing the potential for the interaction of the amine functional group with the solid surface and increasing amine sites available for CO2 capture.

Abstract: The present invention generally relates to a process for the formation of a CO2-selective absorption material and/or sulfur-selective absorption material. In one embodiment, the present invention relates to a process for the formation of a CO2-selective absorption material that comprises providing a solid material, providing an amine source, contacting the solid material with the amine source to absorb amine molecules on the surface of the solid material, and contacting the absorbing amine molecules on the solid material surface with a CO2 stream such that upon contact with the amine and the solid material, CO2 binds with the amine functional group of the amine molecule, reducing the potential for the interaction of the amine functional group with the solid surface and increasing amine sites available for CO2 capture.

Abstract: A direct-electrochemical-oxidation fuel cell and method for generating electrical energy from a solid-state organic fuel. The fuel cell includes a cathode provided with an electrochemical-reduction catalyst that promotes formation of oxygen ions from an oxygen-containing source at the cathode, an anode provided with an electrochemical-oxidation catalyst that promotes direct electrochemical oxidation of the solid-state organic fuel in the presence of the oxygen ions to produce electrical energy, and a solid-oxide electrolyte disposed to transmit the oxygen ions from the cathode to the anode. The electrochemical oxidation catalyst can optionally include a sulfur resistant material.

Abstract: A high-performance water heater is constructed to include a heat absorber, the heat absorber defining an oil chamber that holds an oil, a heat guide defining a water chamber, the heat guide having a cold water pipe adapted to guide cold water into the water chamber and a hot water pipe adapted to guide hot water out of the water chamber, a plurality of heat conducting members connected between the heat absorber and the heat guide and adapted to transfer heat energy from the oil in the oil chamber to water in the water chamber of the heat guide, and a heating device adapted to heat the heat absorber.

Abstract: A slurry of abrasive particles 17 is placed on the surface of an optic material 28. A tool tip 16 driven by an ultrasonic transducer 12 is immersed in the slurry 17 where it is used to ultrasonically vibrate the particles in the slurry 17. The vibration of the abrasive particles causes matter removal from the surface of the optic material 28 by abrasion. The tool tip 16 is moved relatively over the surface of the material 28 by moving a precision translation stage 18 having the material 28 mounted thereon so as to machine the surface thereof.