Abstract: Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.

Abstract: Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively undispersed, area spot on a material system.

Abstract: Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation; and at least one multiple element lens which also transmits the electromagnetic beam therethrough.

Abstract: Disclosed is methodology for obtaining data of improved precision, including detection and replacement of data determined to be suspect to provide good data over a spectroscopic range of wavelengths.

Abstract: Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data detector.

Abstract: Disclosed are spectroscopic ellipsometer and combined spectroscopic reflectometer/ellipsometer systems. The spectroscopic ellipsometer system portion includes polarizer and analyzer elements which remain fixed in position during data acquisition, and a step-wise rotatable compensator electromagnetic beam transmitting means, which serves to enable imposing a plurality of sequentially discrete, rather than continuously varying, polarization states on said beam of electromagnetic radiation. Further disclosed is a calibration procedure for said spectroscopic ellipsometer system portion of the invention which involves the gathering of, for each of a plurality of ellipsometrically distinct sample systems, spectroscopic data at a sequential plurality of discrete electromagnetic radiation beam polarization states, combined with providing of a mathematical model of the spectroscopic ellipsometer system and application of a mathematical regression procedure.

Abstract: Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.

Abstract: Disclosed are spectrophotometer systems and methodology for obtaining data of improved precision therefrom, including replacement of data determined to be suspect based on comparison of multiple baselines.

Abstract: Disclosed is an odd bounce image rotating system with a sequence of an odd number of reflecting elements, such that a polarized electromagnetic beam caused to enter, reflectively interacts with the odd number of reflecting elements and exits along an essentially non-deviated, non-displaced locus, but with an azimuthally rotated polarization state. Application to, and methodology of application to set azimuthal angles of polarization in spectroscopic ellipsometer, polarimeter and the like systems is also disclosed.

Abstract: Disclosed are spectrophotometer, polarimeter, and ellipsometer systems which have multiple easily, sequentially, positionable detector systems therein mounted to allow easy positioning thereof, to for instance, allow sequential monitoring of ellipsometric and spectrophotometric signals, without removal of any detector system from the spectrophotometer, polarimeter, or ellipsometer system. Also disclosed are methods of use wherein-different detectors in a positionable multiple detector containing system are utilized during different electromagnetic beam detection steps.

Abstract: Disclosed is a rotating compensator sample system investigation system which includes a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer, and at least two detector systems which are positioned each to intercept a different of the at least two electromagnetic beams which emerge from the beam splitting analyzer. Also disclosed is a regression based approach to calibration which simultaneously extracts a sample system PSI and DELTA.

Abstract: Disclosed are spectrophotometer systems and methodology for obtaining data of improved precision therefrom, including replacement of data determined to be suspect based on comparison of multiple baselines.

Abstract: Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from an upper point. A third side is oriented essentially horizontally and is continuous with, and present below, the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, an entered beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of its incidence, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.

Abstract: Disclosed are retarder systems, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second Berek-type retarders which each present with first and second essentially parallel sides. The first and second Berek-type retarders are oriented, as viewed in side elevation, with first and second sides of one Berek-type retarder being oriented other than parallel to first and second sides of the other Berek-type retarder. During use in a spectroscopic ellipsometer/polarimeter system, a beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of an incident beam of electromagnetic radiation, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation. A system with similarly oriented third and fourth Berek-type retarders, sequentially placed after the first and second Berek-type retarders, is also disclosed.

Abstract: A retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second triangular shaped elements arranged so that the first triangular shaped element, as viewed in side elevation, presents with first and second sides which project to the left and right and downward from an upper point, with a third side which is oriented essentially horizontally and is continuous with, and present below the first and second sides; and so that the second triangular shaped element, as viewed in side elevation, presents with first and second sides which project to the left and right and upward from a lower point, with a third side which is oriented essentially horizontally and is continuous with, and present above the first and second sides.

Abstract: A retarder system and method of its use in ellipsometers and polarimeters are disclosed. The retarder system is a parallelogram shaped element which, as viewed in side elevation, has top and bottom sides which are parallel to one another. The retarder system also has right and left sides which are parallel to one another, with both the right and left sides being oriented at an angle to the top and bottom sides. The retarder system is made of a material with an index of refraction greater than that of a surrounding ambient.

Abstract: A retarder system suitable for use in ellipsometers and polarimeters is configured from a first triangular shaped element with reflective outer surfaces, and a second triangular shaped element with reflective inner surfaces. In addition, a non-Brewster angle polarizer system suitable for use in ellipsometers and polarimeters is configured from two plates which are oriented other than parallel with respect to one another. A beam of electromagnetic radiation entered to the retarder system or polarizer system exits with a changed state of polarization, but with essentially no deviation or displacement in the direction of propagation, even when, in the case of the retarder system, it is caused to rotate about the locus of the beam of electromagnetic radiation.

Abstract: Disclosed is a system and method for controlling polarization state determining parameters of a polarized beam of light in an ellipsometer or polarimeter and the like system, (eg. a modulation element ellipsometer system), so that they are in ranges wherein the sensitivity, (of a sample system characterizing PSI and DELTA value monitoring detector used to measure changes in said polarization state resulting from interaction with a "composite sample system," comprised of a sample system per se. and a beam polarization state determining variable retarder, to noise and measurement errors etc. therein), is reduced. The present invention allows determining sample system per se. characterizing PSI and DELTA values, from Composite Sample System characterizing PSI and DELTA values, by compensating for the presence of present invention components, (VR1) and/or VR2), added to an ellipsometer or polarimeter and the like system.

Abstract: Disclosed are optical elements for use in ellipsometer/polarimeter systems which do not introduce significant deviation and/or displacement into the propagation direction of a beam of electromagnetic radiation caused to interact therewith, even when said optical elements are caused to continuously rotate. Specifically disclosed is a Polarizer system with a high extinction ratio which can be used at infrared wavelengths, as well as a number of retarder systems with retardation vs. wavelength dispersion characteristics which are within a range of acceptability. In addition, certain disclosed optical elements demonstrate limited immunity to beam alignment changes.

Abstract: Disclosed is a dispersive optics system, in the context of sample substrate system investigating spectroscopic reflectometer and the like systems, which, in use, produce a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light, over a larger range, than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders. Also disclosed is a quadrant detector means of dispersive optics alignment, and a compensator means for reducing the effect of detector element polarization state dependence.