Patents by Inventor Steven H. Voldman

Steven H. Voldman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8054597
    Abstract: Electrostatic discharge (ESD) structures having a connection to a through wafer via structure and methods of manufacture are provided. The structure includes an electrostatic discharge (ESD) network electrically connected in series to a through wafer via. More specifically, the ESD circuit includes a bond pad and an ESD network located under the bond pad. The ESD circuit further includes a through wafer via structure electrically connected in series directly to the ESD network, and which is also electrically connected to VSS.
    Type: Grant
    Filed: June 23, 2009
    Date of Patent: November 8, 2011
    Assignee: International Business Machines Corporation
    Inventors: Ephrem G. Gebreselasie, Steven H. Voldman
  • Patent number: 8044510
    Abstract: A structure includes a substrate. A trench structure is arranged within the substrate. A film is placed under an interlevel dielectric pad and between portions of the trench structure.
    Type: Grant
    Filed: October 22, 2008
    Date of Patent: October 25, 2011
    Assignee: International Business Machines Corporation
    Inventors: Ephrem G. Gebreselasie, William T. Motsiff, Wolfgang Sauter, Steven H. Voldman
  • Patent number: 8035190
    Abstract: A device comprises a first sub-collector formed in an upper portion of a substrate and a lower portion of a first epitaxial layer and a second sub-collector formed in an upper portion of the first epitaxial layer and a lower portion of a second epitaxial layer. The device further comprises a reach-through structure connecting the first and second sub-collectors and an N-well formed in a portion of the second epitaxial layer and in contact with the second sub-collector and the reach-through structure. The device further comprises N+ diffusion regions in contact with the N-well, a P+ diffusion region in contact with the N-well, and shallow trench isolation structures between the N+ and P+ diffusion regions.
    Type: Grant
    Filed: March 17, 2010
    Date of Patent: October 11, 2011
    Assignee: International Business Machines Corporation
    Inventors: Xuefeng Liu, Robert M. Rassel, Steven H. Voldman
  • Publication number: 20110227166
    Abstract: A structure for preventing latchup. The structure includes a latchup sensitive structure and a through wafer via structure bounding the latch-up sensitive structure to prevent parasitic carriers from being injected into the latch-up sensitive structure.
    Type: Application
    Filed: June 1, 2011
    Publication date: September 22, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventor: Steven H. VOLDMAN
  • Publication number: 20110227130
    Abstract: Semiconductor structures and methods of forming semiconductor structures, and more particularly to structures and methods of forming SiGe and/or SiGeC buried layers for SOI/SiGe devices. An integrated structure includes discontinuous, buried layers having alternating Si and SiGe or SiGeC regions. The structure further includes isolation structures at an interface between the Si and SiGe or SiGeC regions to reduce defects between the alternating regions. Devices are associated with the Si and SiGe or SiGeC regions.
    Type: Application
    Filed: June 1, 2011
    Publication date: September 22, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Xuefeng LIU, Robert M. RASSEL, Steven H. VOLDMAN
  • Patent number: 8017471
    Abstract: A method of manufacturing a semiconductor structure includes: forming a trench in a back side of a substrate; depositing a dopant on surfaces of the trench; forming a shallow trench isolation (STI) structure in a top side of the substrate opposite the trench; forming a deep well in the substrate; out-diffusing the dopant into the deep well and the substrate; forming an N-well and a P-well in the substrate; and filling the trench with a conductive material.
    Type: Grant
    Filed: August 6, 2008
    Date of Patent: September 13, 2011
    Assignee: International Business Machines Corporation
    Inventors: Phillip F. Chapman, David S. Collins, Steven H. Voldman
  • Patent number: 8015518
    Abstract: A design structure for electrostatic discharge protection comprises a first data representing a first electrostatic discharge (ESD) protection circuit and a second data representing a second ESD protection circuit. A parallel connection of two ESD protection units, each providing a discharge path for electrical charges of opposite types, provides ESD protection circuit for positive and negative voltage swings in the circuit. Each of the multiple emitter-base regions are cascaded such that the base of one emitter-base region is directly wired to the emitter of an adjacent emitter-base region. The first data represents a first ESD protection unit providing protection on one type of voltage swing, and the second data represents a second ESD protection unit providing protection on the other type of voltage swing.
    Type: Grant
    Filed: April 23, 2008
    Date of Patent: September 6, 2011
    Assignee: International Business Machines Corporation
    Inventor: Steven H. Voldman
  • Patent number: 8015538
    Abstract: The invention relates to noise isolation in semiconductor devices, and a design structure on which a subject circuit resides. A design structure is embodied in a machine readable medium used in a design process. The design structure includes a deep sub-collector located in a first epitaxial layer, and a doped region located in a second epitaxial layer, which is above the first epitaxial layer. The design structure further includes a reach-through structure penetrating from a surface of the device through the first and second epitaxial layers to the deep sub-collector, and a trench isolation structure penetrating from a surface of the device and surrounding the doped region.
    Type: Grant
    Filed: November 16, 2007
    Date of Patent: September 6, 2011
    Assignee: International Business Machines Corporation
    Inventors: Douglas D Coolbaugh, Xuefeng Liu, Robert M. Rassel, David C. Sheridan, Steven H. Voldman
  • Publication number: 20110198703
    Abstract: A method of manufacturing a semiconductor structure includes: forming a trench in a back side of a substrate; depositing a dopant on surfaces of the trench; forming a shallow trench isolation (STI) structure in a top side of the substrate opposite the trench; forming a deep well in the substrate; out-diffusing the dopant into the deep well and the substrate; forming an N-well and a P-well in the substrate; and filling the trench with a conductive material.
    Type: Application
    Filed: April 27, 2011
    Publication date: August 18, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Phillip F. CHAPMAN, David S. COLLINS, Steven H. VOLDMAN
  • Patent number: 7989282
    Abstract: A method and structure for preventing latchup. The structure includes a latchup sensitive structure and a through wafer via structure bounding the latch-up sensitive structure to prevent parasitic carriers from being injected into the latch-up sensitive structure.
    Type: Grant
    Filed: March 26, 2009
    Date of Patent: August 2, 2011
    Assignee: International Business Machines Corporation
    Inventor: Steven H. Voldman
  • Patent number: 7989306
    Abstract: Semiconductor structures and methods of forming semiconductor structures, and more particularly to structures and methods of forming SiGe and/or SiGeC buried layers for SOI/SiGe devices. An integrated structure includes discontinuous, buried layers having alternating Si and SiGe or SiGeC regions. The structure further includes isolation structures at an interface between the Si and SiGe or SiGeC regions to reduce defects between the alternating regions. Devices are associated with the Si and SiGe or SiGeC regions.
    Type: Grant
    Filed: June 29, 2007
    Date of Patent: August 2, 2011
    Assignee: International Business Machines Corporation
    Inventors: Xuefeng Liu, Robert M. Rassel, Steven H. Voldman
  • Patent number: 7977714
    Abstract: A wrapped gate junction field effect transistor (JFET) with at least one semiconductor channel having a first conductivity type doping is provided. Both sidewalls of each of the at least one semiconductor channel laterally abuts a side gate region having a second conductivity type doping, which is the opposite of the first conductivity doping. Further, the at least one semiconductor channel vertically abuts a top gate region and at least one bottom gate region, both having the second conductivity type doping. The gate electrode, which comprises side gate region, the top gate region, and at least one bottom gate regions, wraps around each of the at least one semiconductor channel to provide tight control of the current, i.e., a low off-current, through the at least one semiconductor channel. By employing multiple channels, the JFET may provide a high on-current.
    Type: Grant
    Filed: October 19, 2007
    Date of Patent: July 12, 2011
    Assignee: International Business Machines Corporation
    Inventors: John Ellis-Monaghan, Richard A. Phelps, Robert M. Rassel, Steven H. Voldman, Michael J. Zierak
  • Patent number: 7956412
    Abstract: A dielectric material layer is formed on a bottom surface and sidewalls of a trench in a semiconductor substrate. The silicon oxide layer forms a drift region dielectric on which a field plate is formed. Shallow trench isolation may be formed prior to formation of the drift region dielectric, or may be formed utilizing the same processing steps as the formation of the drift region dielectric. A gate dielectric layer is formed on exposed semiconductor surfaces and a gate conductor layer is formed on the gate dielectric layer and the drift region dielectric. The field plate may be electrically tied to the gate electrode, may be an independent electrode having an external bias, or may be a floating electrode. The field plate biases the drift region to enhance performance and extend allowable operating voltage of a lateral diffusion field effect transistor during operation.
    Type: Grant
    Filed: December 4, 2007
    Date of Patent: June 7, 2011
    Assignee: International Business Machines Corporation
    Inventors: Natalie B. Feilchenfeld, Jeffrey P. Gambino, Louis D. Lanzerotti, Benjamin T. Voegeli, Steven H. Voldman, Michael J. Zierak
  • Patent number: 7949983
    Abstract: A resistor device structure and method of manufacture therefore, wherein the resistor device structure invention includes a plurality of alternating conductive film and insulative film layers, at least two of the conductive film layers being electrically connected in parallel to provide for high current flow through the resistor device at high frequencies with increased temperature and mechanical stability. The alternating conductive film and insulative film layers may be of a planar or non-planar geometric spatial orientation. The alternating conductive film and insulative film layers may include lateral and vertical portions designed to enable a uniform current density flow within the structure itself through a self-ballasting effect within the physical resistor.
    Type: Grant
    Filed: September 19, 2008
    Date of Patent: May 24, 2011
    Assignee: International Business Machines Corporation
    Inventors: Ebenezer E. Eshun, Steven H. Voldman
  • Publication number: 20110117714
    Abstract: A method of forming an isolation region is provided that in one embodiment substantially reduces divot formation. In one embodiment, the method includes providing a semiconductor substrate, forming a first pad dielectric layer on an upper surface of the semiconductor substrate and forming a trench through the first pad dielectric layer into the semiconductor substrate. In a following process sequence, the first pad dielectric layer is laterally etched to expose an upper surface of the semiconductor substrate that is adjacent the trench, and the trench is filled with a trench dielectric material, wherein the trench dielectric material extends atop the upper surface of the semiconductor substrate adjacent the trench and abuts the pad dielectric layer.
    Type: Application
    Filed: November 19, 2009
    Publication date: May 19, 2011
    Inventors: Max Levy, Natalie Feilchenfeld, Richard Phelps, BethAnn Rainey, James Slinkman, Steven H. Voldman, Michael Zierak, Hubert Enichlmair, Martin Knaipp, Bernhard Loeffler, Rainer Minixhofer, Jong-Mun Park, Georg Roehrer
  • Patent number: 7943437
    Abstract: Method of making an electronic fuse blow resistor structure. In one embodiment, the method includes forming an insulator film, depositing a conductor on the insulator film, and after the depositing, etching the conductor to form a plurality of spaced apart non-conductive regions and a plurality of spaced-apart conductive regions. In another embodiment, the method includes forming the insulator film, forming a conductive sheet, and sub-dividing the conductive sheet into the plurality of conductive regions.
    Type: Grant
    Filed: October 12, 2007
    Date of Patent: May 17, 2011
    Assignee: International Business Machines Corporation
    Inventor: Steven H. Voldman
  • Patent number: 7886240
    Abstract: Modifying a layout of an integrated circuit (IC) based on a function of an interconnect therein and a related circuit and design structure are disclosed. In one embodiment, a method includes identifying a function of an interconnect in the layout from data of the layout embodied in a computer readable medium; and modifying the layout to form another layout that accommodates the function of the interconnect. A design structure embodied in a machine readable medium used in a design process, according to one embodiment, may include a circuit including a high voltage interconnect positioned in a dielectric layer, the high voltage interconnect positioned such that no fill is above or below the high voltage interconnect.
    Type: Grant
    Filed: January 29, 2008
    Date of Patent: February 8, 2011
    Assignee: International Business Machines Corporation
    Inventors: James W. Adkisson, Natalie B. Feilchenfeld, Jeffrey P. Gambino, Howard S. Landis, Benjamin T. Voegeli, Steven H. Voldman, Michael J. Zierak
  • Patent number: 7876547
    Abstract: Vertical parallel plate (VPP) capacitor structures that utilize different spacings between conductive plates in different levels of the capacitor stack. The non-even spacings of the conductive plates in the capacitor stack decrease the susceptibility of the capacitor stack of the VPP capacitor to ESD-promoted failures. The non-even spacings may be material specific in that, for example, the spacings between adjacent conductive plates in different levels of the capacitor stack may be chosen based upon material failure mechanisms for plates containing different materials.
    Type: Grant
    Filed: May 30, 2007
    Date of Patent: January 25, 2011
    Assignee: International Business Machines Corporation
    Inventors: Ephrem G. Gebreselasie, Zhong-Xiang He, Steven H. Voldman
  • Publication number: 20100327398
    Abstract: A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a high resistivity substrate and a buried inductor formed directly in the high resistivity substrate and devoid of an insulating layer therebetween.
    Type: Application
    Filed: September 3, 2010
    Publication date: December 30, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Max G. LEVY, Steven H. VOLDMAN
  • Publication number: 20100321842
    Abstract: Electrostatic discharge (ESD) structures having a connection to a through wafer via structure and methods of manufacture are provided. The structure includes an electrostatic discharge (ESD) network electrically connected in series to a through wafer via. More specifically, the ESD circuit includes a bond pad and an ESD network located under the bond pad. The ESD circuit further includes a through wafer via structure electrically connected in series directly to the ESD network, and which is also electrically connected to VSS.
    Type: Application
    Filed: June 23, 2009
    Publication date: December 23, 2010
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ephrem G. GEBRESELASIE, Steven H. VOLDMAN