Patents by Inventor Steven Juliano

Steven Juliano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integration of an Optical Height Sensor in Mask Inspection Tools
    Publication number: 20220196572
    Abstract: A photomask-inspection system includes a vacuum chamber and a stage, disposed in the vacuum chamber, to support a photomask and to translate the photomask horizontally and vertically. The system also includes an EUV objective, disposed in the vacuum chamber, to collect EUV light from the photomask to inspect the photomask for defects and an optical height sensor, at least partially disposed in the vacuum chamber, to measure heights on a surface of the photomask. The system further includes a stage controller to translate the stage horizontally and vertically in accordance with a focal map for the photomask produced using the measured heights on the surface of the photomask.
    Type: Application
    Filed: June 21, 2021
    Publication date: June 23, 2022
    Inventors: Zefram Marks, Dmitry Skvortsov, Zhengyu Guo, Zhengcheng Lin, Nicolas Steven Juliano, Rui-Fang Shi
  • Floor mat
    Patent number: D493322
    Type: Grant
    Filed: June 11, 2003
    Date of Patent: July 27, 2004
    Assignee: Elegant USA, LLC
    Inventor: Steven Juliano