Abstract: Methods of producing an optical surface atop an exterior of a substrate that includes smoothing the exterior using an ALD process to sequentially deposit ALD layers to produce one or more ALD films that fill spaces between spaced-apart asperities existing on the exterior, and thereafter depositing a reflective material on the smoothed exterior of the substrate to produce the optical surface. The smoothing resulting from depositing the ALD film on the exterior of the substrate causes the grain size of the reflective material to be reduced in comparison to the grain size that would exists without having deposited the ALD film on the exterior of the substrate. The smoothing is sufficient to cause a reduction in grain size that results in a reduction in plasmon absorption in the optical surface in comparison to the plasmon absorption that would otherwise exist without having reduced the grain size of the reflective material.

Abstract: The present invention relates to the unexpected discovery of novel methods of preparing nanodevices and/or microdevices with predetermined patterns. In one aspect, the methods of the invention allow for engineering structures and films with continuous thickness equal to or less than 50 nm.

Abstract: A method for removal of stray Ru metal nuclei for selective Ru metal layer formation includes depositing ruthenium (Ru) metal on a patterned substrate by vapor phase deposition, where a Ru metal layer is deposited on a surface of a metal layer and Ru metal nuclei are deposited on a surface of a dielectric layer. The method further includes removing the Ru metal nuclei by gas phase etching using an ozone (O3) gas exposure that forms volatile ruthenium oxide species by oxidation of the Ru metal nuclei, and repeating the depositing and removing steps at least once to increase a thickness of the Ru metal layer, where the depositing is interrupted before the Ru metal nuclei reach a critical size that results in formation of non-volatile ruthenium oxide species and incomplete removal of the Ru metal nuclei during the gas phase etching.

Abstract: Method for selective etching of materials using an ultrathin etch stop layer (ESL), where the ESL is effective at a thickness as small as approximately one monolayer using atomic layer etching (ALE). A substrate processing method includes depositing a first film on a substrate, depositing a second film on the first film, and selectively etching the second film relative to the first film using an ALE process, where the etching self-terminates at an interface of the second film and the first film.

Abstract: The present invention relates to the unexpected discovery of novel methods of preparing nanodevices and/or microdevices with predetermined patterns. In one aspect, the methods of the invention allow for engineering structures and films with continuous thickness equal to or less than 50 nm.

Abstract: The invention includes a method of promoting atomic layer etching (ALE) of a surface. In certain embodiments, the method comprises sequential reactions with a metal precursor and a halogen-containing gas. The invention provides a solid substrate obtained according to any of the methods of the invention. The invention further provides a porous substrate obtained according to any of the methods of the invention. The invention further provides a patterned solid substrate obtained according to any of the methods of the invention.

Abstract: The invention includes a method of promoting thin film growth on a solid substrate, wherein derivatization of the substrate comprises formation of at least one surface species. In certain embodiments, the method comprises desorbing the surface species from the substrate using electron stimulated desorption (ESD).

Abstract: The invention includes a method of promoting atomic layer etching (ALE) of a surface. In certain embodiments, the method comprises contacting a solid substrate comprising a first metal compound with an oxidant, optionally contacting the solid substrate with a second metal compound, and then contacting the modified solid substrate with a fluorinating agent, whereby ALE of the solid substrate is promoted.

Abstract: A method for forming a corrosion-resistant catalyst for fuel cell catalyst layers is provided. The method includes a step of depositing a conformal Pt or platinum alloy thin layer on NbO2 substrate particles to form Pt-coated NbO2. The Pt-coated NbO2 particles are then incorporated into a fuel cell catalyst layer.

Abstract: Ultrathin layers of organic polymers or organic-inorganic hybrid polymers are deposited onto a substrate using molecular layer deposition methods. The process uses vapor phase materials which contain a first functional group and react only monofunctionally at the surface to add a unit to the polymer chain. The vapor phase reactant in addition has a second functional group, which is different from the first functional group, or a blocked, masked or protected functional group, or else has a precursor to such a functional group.

Abstract: The invention includes a method of promoting atomic layer etching (ALE) of a surface. In certain embodiments, the method comprises contacting a solid substrate comprising a first metal compound with an oxidant, optionally contacting the solid substrate with a second metal compound, and then contacting the modified solid substrate with a fluorinating agent, whereby ALE of the solid substrate is promoted.

Abstract: A coated substrate for forming fuel cell catalyst layers includes a plurality of substrate particles, an adhesion layer disposed over the substrate particles, and a precious metal layer disposed over the adhesion layer. The substrate particles may be carbon powders, carbon nanorods, carbon nanotubes and combinations thereof; with a preferred aspect ratio from 10:1 to 25:1. The adhesion layer includes a tungsten metal layer and may be formed into a heterogeneous layer comprising a lattice-interrupting layer interposed between two tungsten metal layers. The lattice-interrupting layer reduces mechanical stress to the adhesion layer with extended thickness that may develop when it experiences changing environments, and can be any layer other than the metal layer, for example, Al2O3, Al, or WOx, where x is 1.5 to 3.0. Characteristically, the coated substrate is used in fuel cell applications such as providing the catalyst particles used in the cathode and/or anode catalyst layers.

Abstract: The invention includes a method of promoting atomic layer etching (ALE) of a surface. In certain embodiments, the method comprises sequential reactions with a metal precursor and a halogen-containing gas. The invention provides a solid substrate obtained according to any of the methods of the invention. The invention further provides a porous substrate obtained according to any of the methods of the invention. The invention further provides a patterned solid substrate obtained according to any of the methods of the invention.

Abstract: Coatings are applied on a flexible substrate using atomic layer deposition and molecular layer deposition methods. The coatings have thickness of up to 100 nanometers. The coatings include layers of an inorganic material such as alumina, which are separated by flexibilizing layers that are deposited with covalent chemical linkage to the inorganic material and which are one or more of silica deposited by an atomic layer deposition process; an organic polymer that is deposited by a molecular layer deposition process, or a hybrid organic-inorganic polymer that is deposited by an molecular layer deposition process.

Abstract: A method for forming a corrosion-resistant catalyst for fuel cell catalyst layers is provided. The method includes a step of depositing a conformal Pt or platinum alloy thin layer on NbO2 substrate particles to form Pt-coated NbO2. The Pt-coated NbO2 particles are then incorporated into a fuel cell catalyst layer.

Abstract: The present invention relates to a method and a composition comprising a polymer substrate having free volume and/or a porous surface; and an inorganic film layer comprising a metal oxide or nitride at least partially covering the polymer substrate.

Abstract: Supercapacitors have composite electrodes that include a porous carbonaceous material such as graphene onto which a metal oxide pseudocapacitor material is deposited in the form of nano-scale particles or a nano-scale film. The composite electrodes exhibit excellent specific capacitance, even at high scan rates.

Abstract: The invention includes a method of promoting thin film growth on a solid substrate, wherein derivatization of the substrate comprises formation of at least one surface species. In certain embodiments, the method comprises desorbing the surface species from the substrate using electron stimulated desorption (ESD).

Abstract: Inorganic materials are deposited onto organic polymers using ALD methods. Ultrathin, conformal coatings of the inorganic materials can be made in this manner. The coated organic polymers can be used as barrier materials, as nanocomposites, as catalyst supports, in semiconductor applications, in coating applications as well as in other applications.

Abstract: Electrodes for lithium batteries are coated via an atomic layer deposition process. The coatings can be applied to the assembled electrodes, or in some cases to particles of electrode material prior to assembling the particles into an electrode. The coatings can be as thin as 2 ?ngstroms thick. The coating provides for a stable electrode. Batteries containing the electrodes tend to exhibit high cycling capacities.