Abstract: Methods of forming a conductive metal layer over a dielectric layer using plasma enhanced atomic layer deposition (PEALD) are provided, along with related compositions and structures. A plasma barrier layer is deposited over the dielectric layer by a non-plasma atomic layer deposition (ALD) process prior to depositing the conductive layer by PEALD. The plasma barrier layer reduces or prevents deleterious effects of the plasma reactant in the PEALD process on the dielectric layer and can enhance adhesion. The same metal reactant can be used in both the non-plasma ALD process and the PEALD process.

Abstract: Methods of forming a metal carbide film are provided. In some embodiments, a substrate is exposed to alternating pulses of a transition metal species and plasma-excited argon. The transition metal species is reacted with a carbon species to deposit a metal carbide film. The substrate is exposed to the carbon species simultaneously with the transition metal species, or the substrate is exposed to the carbon species in pulses temporally separated from the pulses of the transition metal species. In some embodiments, the carbon species and the transition metal species form parts of the same precursor compound, e.g., a metal organic compound.

Abstract: In one aspect, non-conformal layers are formed by variations of plasma enhanced atomic layer deposition, where one or more of pulse duration, separation, RF power on-time, reactant concentration, pressure and electrode spacing are varied from true self-saturating reactions to operate in a depletion-effect mode. Deposition thus takes place close to the substrate surface but is controlled to terminate after reaching a specified distance into openings (e.g., deep DRAM trenches, pores, etc.). Reactor configurations that are suited to such modulation include showerhead, in situ plasma reactors, particularly with adjustable electrode spacing.

Abstract: Methods of forming metal carbide films are provided. In some embodiments, a substrate is exposed to alternating pulses of a transition metal species and an aluminum hydrocarbon compound, such as TMA, DMAH, or TEA. The aluminum hydrocarbon compound is selected to achieve the desired properties of the metal carbide film, such as aluminum concentration, resistivity, adhesion and oxidation resistance. In some embodiments, the methods are used to form a metal carbide layer that determines the work function of a control gate in a flash memory.

Abstract: Methods of forming a metal carbide film are provided. In some embodiments, a substrate is exposed to alternating pulses of a transition metal species and plasma-excited argon. The transition metal species is reacted with a carbon species to deposit a metal carbide film. The substrate is exposed to the carbon species simultaneously with the transition metal species, or the substrate is exposed to the carbon species in pulses temporally separated from the pulses of the transition metal species. In some embodiments, the carbon species and the transition metal species form parts of the same precursor compound, e.g., a metal organic compound.

Abstract: Methods of forming metal oxide thin films and related structures are provided. One embodiment of the methods includes conducting a plurality of cycles of deposition on a substrate. Each cycle includes supplying oxygen gas and an inert gas into a reaction space substantially continuously during the cycle. A metal precursor is supplied into the reaction space for a first duration. The metal precursor is a cyclopentadienyl compound of the metal. After the metal precursor is supplied, the continuously flowing oxygen gas is activated for a second duration to generate a plasma in the reaction space. The cycle is conducted at a temperature below about 400° C. The methods can be performed after forming a structure on the substrate, wherein the structure is formed of a material which is physically and/or chemically unstable at a high temperature.

Abstract: In one aspect, non-conformal layers are formed by variations of plasma enhanced atomic layer deposition, where one or more of pulse duration, separation, RF power on-time, reactant concentration, pressure and electrode spacing are varied from true self-saturating reactions to operate in a depletion-effect mode. Deposition thus takes place close to the substrate surface but is controlled to terminate after reaching a specified distance into openings (e.g., deep DRAM trenches, pores, etc.). Reactor configurations that are suited to such modulation include showerhead, in situ plasma reactors, particularly with adjustable electrode spacing.

Abstract: Methods for forming passivated stoichiometric metal nitride films are provided along with structures incorporating such films. The preferred methods include contacting a substrate with alternating and sequential pulses of a metal source chemical, one or more plasma-excited species of hydrogen and a nitrogen source chemical to form a stoichiometric metal nitride film, followed by exposure of the stoichiometric metal nitride film to a source chemical of a passivating species to form a passivation layer over the stoichiometric metal nitride film.

Abstract: The present invention relates to a method of distributing music comprising creating a structured audio file from an audio track, the audio track having two portions, the first portion comprising data to reproduce a lower quality version of the audio track by a media player and data in a second portion that can be used to reproduce a higher quality version of the audio track.

Abstract: Methods for forming passivated stoichiometric metal nitride films are provided along with structures incorporating such films. The preferred methods include contacting a substrate with alternating and sequential pulses of a metal source chemical, one or more plasma-excited species of hydrogen and a nitrogen source chemical to form a stoichiometric metal nitride film, followed by exposure of the stoichiometric metal nitride film to a source chemical of a passivating species to form a passivation layer over the stoichiometric metal nitride film.

Abstract: Methods of forming a metal carbide film are provided. In some embodiments, methods for forming a metal carbide film in an atomic layer deposition (ALD) type process comprise alternately and sequentially contacting a substrate in a reaction space with vapor phase pulses of a metal compound and one or more plasma-excited species of a carbon-containing compound. In other embodiments, methods of forming a metal carbide film in a chemical vapor deposition (CVD) type process comprise simultaneously contacting a substrate in a reaction space with a metal compound and one or more plasma-excited species of a carbon-containing compound. The substrate is further exposed to a reducing agent.

Abstract: In one aspect, non-conformal layers are formed by variations of plasma enhanced atomic layer deposition, where one or more of pulse duration, separation, RF power on-time, reactant concentration, pressure and electrode spacing are varied from true self-saturating reactions to operate in a depletion-effect mode. Deposition thus takes place close to the substrate surface but is controlled to terminate after reaching a specified distance into openings (e.g., deep DRAM trenches, pores, etc.). Reactor configurations that are suited to such modulation include showerhead, in situ plasma reactors, particularly with adjustable electrode spacing.

Abstract: A mobile handset for use in a mobile communications system includes a user interface, a radio communications front end, a radio transceiving antenna, and a browser application to interpret a multimedia document received from a remote server. The browser application recognizes textual presentation markup tags in the document and presents text to a user in accordance with the markup tags. The browser application recognizes a standard set of document-independent local library file markup tags in the document, and stores a standard set of non-textual local library files corresponding to the local library file markup tags. The browser application further presents content provided by one of the local library files via the user interface in response to the recognition of one of the local library file markup tags in the document.

Abstract: A mobile handset for use in a mobile communications system includes a user interface, a radio communications front end, a radio transceiving antenna, and a browser application to interpret a multimedia document received from a remote server. The browser application recognizes textual presentation markup tags in the document and presents text to a user in accordance with the markup tags. The browser application recognizes a standard set of document-independent local library file markup tags in the document, and stores a standard set of non-textual local library files corresponding to the local library file markup tags. The browser application further presents content provided by one of the local library files via the user interface in response to the recognition of one of the local library file markup tags in the document.

Abstract: Method and apparatus for encoding and manipulating digital signals are provided. The method, and associated apparatus, includes sampling the signal waveform to obtain a series of discrete samples and constructing therefrom a series of frames; multiplying each frame with a windowing function; applying a Fast Fourier transform to each frame producing a frequency-domain waveform; convoluting the resultant frequency domain data with a variable kernel function; locating local maxima and surrounding minima in the magnitude spectrum of each convolved frame, each local maxima and associated minima defining a plurality of regions corresponding to a frequency component of the signal; and analyzing each of the regions in the frequency domain representation by summing the complex frequency components of bins falling within the defined regions into a single vector.

Abstract: The invention provides an apparatus and system for ablation of body structures or tissue in the region of the rectum. A catheter is inserted into the rectum, and an electrode is disposed thereon for emitting energy. The environment for an ablation region is isolated or otherwise controlled by blocking gas or fluid using a pair of inflatable balloons at upstream and downstream locations. Inflatable balloons also serve to anchor the catheter in place. A plurality of electrodes are disposed on the catheter and at least one such electrode is selected and advanced out of the catheter to penetrate and ablate selected tissue inside the body in the region of the rectum. The electrodes are coupled to sensors to determine control parameters of the body structure or tissue, and which are used by feedback technique to control delivery of energy for ablation or fluids for cooling or hydration.

Abstract: A lubricant composition for use in metalworking processes comprising a fatty acid, an amino alcohol and a phosphate ester. Optional components include a triazole, an amine carboxylate, an amine borate or a vegetable oil. The composition may be used in dilute form in water or alcohol.

Abstract: This invention provides apparatus and processes for vibratory finishing of parts wherein the parts are attached to a vibrating head which has internal vibrating mechanism and mechanism for transmitting power to the vibrating mechanism in the vibrating head, then the vibrating head with the parts attached is submerged in the media and the parts vibrated to accomplish the desired finishing. This invention eliminates the necessity for any portion of the vibratory finishing apparatus to vibrate except for that portion which is submerged in the media, namely the vibrating head and attached parts, which is submerged in the media. The finishing provided by this invention is fast, quiet, efficient, effective and versatile.