Abstract: A differential pressure based flow sensor assembly and method of using the same to determine the rate of fluid flow in a fluid system. The sensor assembly comprises a disposable portion and a reusable portion. A flow restricting element is positioned along a fluid flow passage between an inlet and an outlet. The disposable portion further has an upstream fluid pressure membrane and a downstream fluid pressure membrane. The reusable portion has an upstream fluid pressure sensor and a downstream fluid pressure sensor. The upstream fluid pressure sensor senses the upstream fluid pressure at a location within the fluid flow passage between the inlet and the flow restricting element. The downstream fluid pressure sensor senses the downstream fluid pressure at a location within the fluid flow passage between the flow restricting element and the outlet. The process utilizes output of the sensors to calculate the flow rate of the fluid.

Abstract: A differential pressure based flow sensor assembly and method of using the same to determine the rate of fluid flow in a fluid system. The sensor assembly comprises a disposable portion, and a reusable portion. A flow restricting element is positioned along a fluid flow passage between an inlet and an outlet. The disposable portion further has an upstream fluid pressure membrane and a downstream fluid pressure membrane. The reusable portion has an upstream fluid pressure sensor and a downstream fluid pressure sensor. The upstream fluid pressure sensor senses the upstream fluid pressure at a location within the fluid flow passage between the inlet and the flow restricting element. The downstream fluid pressure sensor senses the downstream fluid pressure at a location within the fluid flow passage between the flow restricting element and the outlet. The process utilizes output of the sensors to calculate the flow rate of the fluid.

Abstract: A differential pressure based flow sensor assembly and method of using the same to determine the rate of fluid flow in a fluid system. The sensor assembly comprises a disposable portion, and a reusable portion. A flow restricting element is positioned along a fluid flow passage between an inlet and an outlet. The disposable portion further has an upstream fluid pressure membrane and a downstream fluid pressure membrane. The reusable portion has an upstream fluid pressure sensor and a downstream fluid pressure sensor. The upstream fluid pressure sensor senses the upstream fluid pressure at a location within the fluid flow passage between the inlet and the flow restricting element. The downstream fluid pressure sensor senses the downstream fluid pressure at a location within the fluid flow passage between the flow restricting element and the outlet. The process utilizes output of the sensors to calculate the flow rate of the fluid.

Abstract: A differential pressure based flow sensor assembly and method of using the same to determine the rate of fluid flow in a fluid system. The sensor assembly comprises a disposable portion, and a reusable portion. A flow restricting element is positioned along a fluid flow passage between an inlet and an outlet. The disposable portion further has an upstream fluid pressure membrane and a downstream fluid pressure membrane. The reusable portion has an upstream fluid pressure sensor and a downstream fluid pressure sensor. The upstream fluid pressure sensor senses the upstream fluid pressure at a location within the fluid flow passage between the inlet and the flow restricting element. The downstream fluid pressure sensor senses the downstream fluid pressure at a location within the fluid flow passage between the flow restricting element and the outlet. The process utilizes output of the sensors to calculate the flow rate of the fluid.

Abstract: An anti-microbial filter (105) for a micro-fluidic system (100) includes a silicon-based filter membrane (213) having holes (218) formed therein. The membrane (213) is formed on a substrate (211). One side of the filter membrane (213) has an anti-microbial coating (216) between the holes (218) on the filter membrane (213) and the other side can include filter supports formed from a silicon substrate. A method for making the anti-microbial filter (105) includes forming a filter membrane (213) on a substrate (211), forming holes (218) in the membrane (213) by providing a filter mask (215) and etching holes (218) through holes (222) in the mask (215). Then portions of the substrate (211) are removed from the filter membrane (213) using a masking and etching process to expose the holes (218). An anti-microbial coating is applied to the membrane (213) adjacent the holes (218).

Abstract: A medicine delivery system (10) implantable into a human or animal body includes a medicine delivery unit (14) and a control unit (12). A membrane (26) seals the delivery opening (22) of a medicine compartment (18) and is pre-stressed by an amount less than the predetermined elastic deformation and rupture point limits of the membrane (26). A release element (28) associated with compartment (18) causes the membrane (26) to be stressed beyond the deformation and rupture point limits in response to a control signal (78). Release element (28) ruptures the membrane (26) along a predetermined rupture pattern to permit a first membrane portion (35), forming a hinged lid, to separate from a second membrane portion (37) along the predetermined rupture pattern while remaining attached to the second membrane portion at a hinge (39).

Abstract: An anti-microbial filter (105) for a micro-fluidic system (100) includes a silicon-based filter membrane (213) having holes (218) formed therein. The membrane (213) is formed on a substrate (211). One side of the filter membrane (213) has an anti-microbial coating (216) between the holes (218) on the filter membrane (213) and the other side can include filter supports formed from a silicon substrate. A method for making the anti-microbial filter (105) includes forming a filter membrane (213) on a substrate (211), forming holes (218) in the membrane (213) by providing a filter mask (215) and etching holes (218) through holes (222) in the mask (215). Then portions of the substrate (211) are removed from the filter membrane (213) using a masking and etching process to expose the holes (218). An anti-microbial coating is applied to the membrane (213) adjacent the holes (218).

Abstract: A medicine delivery system (10) implantable into a human or animal body includes a medicine delivery unit (14) and a control unit (12). A membrane (26) seals the delivery opening (22) of a medicine compartment (18) and is pre-stressed by an amount less than the predetermined elastic deformation and rupture point limits of the membrane (26). A release element (28) associated with compartment (18) causes the membrane (26) to be stressed beyond the deformation and rupture point limits in response to a control signal (78). Release element (28) ruptures the membrane (26) along a predetermined rupture pattern to permit a first membrane portion (35), forming a hinged lid, to separate from a second membrane portion (37) along the predetermined rupture pattern while remaining attached to the second membrane portion at a hinge (39).

Abstract: A method for assembling a medicine delivery system (10) includes providing a substrate (16) with a plurality of compartments (18), filling the compartments (18) with medicine (34), covering the compartments (18) with a cap (24), heating the system (10) at a relatively low temperature, applying a voltage bias (56) across the substrate (16) and the cap (24), and applying focused energy (54) to the substrate (16) and/or the cap (24) to seal them together and create a vacuum in the compartments (18).

Abstract: An anti-microbial filter (105) for a micro-fluidic system (100) includes a silicon-based filter membrane (213) having holes (218) formed therein. The membrane (213) is formed on a substrate (211). One side of the filter membrane (213) has an anti-microbial coating (216) between the holes (218) on the filter membrane (213) and the other side can include filter supports formed from a silicon substrate. A method for making the anti-microbial filter (105) includes forming a filter membrane (213) on a substrate (211), forming holes (218) in the membrane (213) by providing a filter mask (215) and etching holes (218) through holes (222) in the mask (215). Then portions of the substrate (211) are removed from the filter membrane (213) using a masking and etching process to expose the holes (218). An anti-microbial coating is applied to the membrane (213) adjacent the holes (218).

Abstract: A valve (105) controls fluid flow in a microfluidic system (100). The valve (105) has an input port adapted to receive fluid exerting a predetermined level of pressure on the valve (105) and an output port. The valve (105) has a variable sized aperture disposed perpendicular to the flow of the fluid (119). The aperture varies in size between a relatively small aperture (137) and a relatively large aperture (151). The small aperture (137) prevents the flow of the fluid (119) through the valve (105) responsive to a relatively high level of capillary forces between the fluid (119) and the valve (105) in the small aperture (137). The large aperture (151) permits the flow of the fluid (119) through the valve (105) responsive to a relatively low level of capillary forces between the fluid (119) and the valve (105) in the large aperture (151).

Abstract: A pair of plate structures (40 and 44), such as a baseplate structure and a faceplate structure of a flat-panel display, are sealed to each other by first attaching the plate structures to each other, typically at multiple attachment locations, in a non-vacuum environment. The plate structures are then hermetically sealed to each other, typically through an outer wall (44) or/and typically by gap jumping, in a vacuum environment.

Abstract: A getter (74) is situated in an auxiliary compartment (72) of a hollow structure (40-46 and 76) having a larger main compartment (70). The auxiliary compartment is situated outside the main compartment and is connected to the main compartment so that the two compartments reach largely the same steady-state compartment pressure. The getter is activated by directing light energy locally through part of the hollow structure and onto the getter. The light energy is typically furnished by a laser beam (60). The getter, typically of the non-evaporable type, is usually inserted as a single piece of gettering material into the auxiliary compartment. The getter normally can be activated/re-activated multiple times in this manner, typically during sealing of different parts of the structure together.

Abstract: Portions (40 and 44) of a structure, such as a flat-panel device, are sealed together by a gap-jumping technique in which a sealing area (40S) of one portion is positioned near a matching sealing area (44S) of another portion such that a gap (48) at least partially separates the two sealing areas. The gap typically has an average height of 25 .mu.m or more. With the two portions of the structure so positioned, energy is initially transferred locally to material of a specified one of the portions along part of the gap while the two portions are in a non-vacuum environment to cause material of the two portions to bridge that part of the gap and partially seal the two portions together along the sealing areas.

Abstract: A flat-panel device, typically a flat-panel display, contains a main compartment (46) formed with a first plate structure (40), a second plate structure (42), and an outer wall (44) that extends between the plate structures. A getter (94) is situated in an auxiliary compartment (92) formed with an auxiliary wall (96) that contacts the first plate structure outside the main compartment, extends away from the first plate structure and main compartment, bends back towards the second plate structure, and contacts the second plate structure outside the main compartment. Control circuitry (84/86) is typically situated over the first plate structure outside the compartments. The auxiliary compartment does not extend significantly further away from the first plate structure than the control circuitry.

Abstract: Trenches which reduce or eliminate force and sensitivity associated with proof mass motion normal to the substrate as a result of voltage transients is disclosed. The trenches provide increased separation between interleaved comb electrodes and the substrate, and thereby also reduce the comb lift to drive ratio. The trenches are typically formed directly below the interleaved comb electrodes, but may also be formed below other suspended portions. Trench depth is from 6-10 microns and provides a comb electrode to substrate separation of approximately 8.5-12.5 microns.